Study on Micro-loading Effect of Etching Rate of Dry Etching for HgCdTe

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Infrared Technology > 2014 > (10): 832-835.

GONG Xiao-dan, HAN Fu-zhong. Study on Micro-loading Effect of Etching Rate of Dry Etching for HgCdTe[J]. Infrared Technology , 2014, (10): 832-835.

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GONG Xiao-dan, HAN Fu-zhong. Study on Micro-loading Effect of Etching Rate of Dry Etching for HgCdTe[J]. Infrared Technology , 2014, (10): 832-835.

Citation:

GONG Xiao-dan, HAN Fu-zhong. Study on Micro-loading Effect of Etching Rate of Dry Etching for HgCdTe[J]. Infrared Technology , 2014, (10): 832-835.

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