Citation: | GOU Zeen, HAN Shunjie, LI Shuangcheng, SU Hua. Fast-Steering-Mirror Slip-Mode Control Based on Extended State Observer[J]. Infrared Technology , 2024, 46(2): 150-154. |
[1] |
Pereira P, Hunwardsen M T, Cahoy K. Characterization of laser thermal loading on microelectromechanical systems-based fast steering mirror in vacuum[J]. Optical Engineering, 2020, 59(5): 056109.
|
[2] |
刘力双, 夏润秋, 吕勇, 等. 音圈电机快速控制反射镜研究现状[J]. 激光杂志, 2020, 41(9): 1-7.
LIU L S, XIA R Q, LV Y, et al. The status research statue of quickly control permiars of audio motors[J]. Laser Journal, 2020, 41(9): 1-7.
|
[3] |
冯爽. 快速反射镜的高精度控制策略研究[D]. 西安: 西安电子科技大学, 2021.
FENG S. Research on High-precision Control Strategies for Fast Mirrors[D]. Xi'an: Xi'an University of Electronic Science and Technology, 2021
|
[4] |
刘泊, 郭建英, 孙永全. 压电陶瓷微位移驱动器建模与控制[J]. 光学精密工程, 2013, 21(6): 1503-1509.
LIU B, GUO J Y, SUN Y Q. Cangers ceramic micro -displacement driving model modeling and control[J]. Optical Precision Engineering, 2013, 21(6): 1503-1509.
|
[5] |
WANG G, RAO C. Adaptive control of piezoelectric fast steering mirror for high precision tracking application[J]. Smart Materials & Structures, 2015, 24(3): 035019. DOI: 10.1088/0964-1726/24/3/035019
|
[6] |
李贤涛, 张晓沛, 毛大鹏, 等. 高精度音圈快速反射镜的自适应鲁棒控制[J]. 光学精密工程, 2017, 25(9): 2428-2436.
LI X T, ZHANG X P, MAO D P. et al. Adaptive robust control of high-precision sound rims of fast reflectors[J]. Optical Precision Engineering, 2017, 25(9): 2428-2436.
|
[7] |
丁科, 黄永梅, 马佳光. 抑制光束抖动的快速反射镜复合控制[J]. 光学精密工程, 2011, 19(9): 1991-1998.
DING K, HUANG Y M, MA J G. Fast-reflective mirror composite control of the beam jitter[J]. Optical Precision Engineering, 2011, 19(9): 1991-1998.
|
[8] |
赵继庭, 金刚石, 高旭辉. 基于快速反射镜的模糊自适应PID控制算法研究[J]. 激光与红外, 2018, 48(6): 756-761.
ZHAO J T, JIN G S, GAO X H. Research on the blog PID control algorithm based on fast purchables[J]. Laser and Infrared, 2018, 48(6): 756-761.
|
[9] |
韩京清. 自抗扰控制技术——估计补偿不确定因素的控制技术[M]. 北京: 国防工业出版社, 2008.
HAN J Q. Self-antidation Control Technology-Control Technology of Estimation Compensation Uncertain Factors[M]. Beijing: National Defense Industry Press, 2008.
|
[10] |
Youm W, Lee S Q, Park K. Optimal design and control of a voice coil motor driven flexure hinge for AFM actuator[C]//IEEE/asme International Conference on Advanced Intelligent Mechatronics, 2005: 325-328.
|
[11] |
黄浦, 杨秀丽, 修吉宏, 等. 音圈致动快速反射镜的降阶自抗扰控制[J]. 光学精密工程, 2020, 28(6): 1365-1374.
HUANG P, YANG X L, XIU J H, et al. The audio coil actuates the reduction of self-relief control of fast reflectives[J]. Optical Precision Engineering, 2020, 28(6): 1365-1374.
|
[12] |
GAO Z. Active disturbance rejection control: a paradigm shift in feedback control system design[C]//American Control Conference of IEEE, 2006: 1656579.
|
[1] | FENG Fan, XIN Daxin, HUA Jin, LIU Peng. High-temperature Furnace Slag Positioning Method for Slag Discharging Manipulator Based on Near-infrared Vision[J]. Infrared Technology , 2019, 41(2): 194-201. |
[2] | LI Hui, XU Shihai, GAO Fei, XU Yongkuan. Study of Surface Roughness of CdS in CMP[J]. Infrared Technology , 2018, 40(10): 931-935. |
[3] | WANG Jingyu, SONG Linwei, KONG Jincheng, WU Jun, HONG Yan, ZHANG Yang, LI Dongsheng. Study of Chemo-mechanical Polishing Process of Long-wave HgCdTe Film Grown by LPE[J]. Infrared Technology , 2018, 40(10): 925-930. |
[4] | GUO Sheng, XIN Sishu, GONG Xiaoxia, YUAN Jun, GUO Jie. Research on Surface Polishing and Corrosion of InSb Chip[J]. Infrared Technology , 2018, 40(2): 133-138. |
[5] | AO Menghan, ZHU Lihui, SUN Shiwen. Research on Chemical-mechanical Polishing Slurry for CdZnTe Crystal[J]. Infrared Technology , 2017, 39(1): 22-26. |
[6] | ZHANG Yang, HUANG Yong-gang, LIU Hui, WANG Yun, LYU Xue-liang. Material Removal Property in Double-sided Polishing Process for Microchannel Plates[J]. Infrared Technology , 2014, (4): 336-342. |
[7] | XIANG Jun-rong, LI Ming-hua, ZHANG Lei. Research of Polishing Technology for InSb Semiconductor Materials[J]. Infrared Technology , 2009, 31(11): 625-627. DOI: 10.3969/j.issn.1001-8891.2009.11.002 |
[8] | ZHANG Mei, HUANG Hui. The Analyses of Cadmium Zinc Telluride Wafers by Mechanical Chemical Polishing[J]. Infrared Technology , 2008, 30(2): 111-113. DOI: 10.3969/j.issn.1001-8891.2008.02.013 |
[9] | ZHANG Yi, BAI Lian-fa, CHEN Qian, GU guo-hua, ZHANG Bao-min. Non-Mechanical Micro-scan Technology Based on Infrared TFT-LCD[J]. Infrared Technology , 2007, 29(9): 518-523. DOI: 10.3969/j.issn.1001-8891.2007.09.007 |
[10] | A Mechanical Design of Optical-Near Infrared Camera CASCAM[J]. Infrared Technology , 2004, 26(4): 20-24,30. DOI: 10.3969/j.issn.1001-8891.2004.04.005 |
1. |
赵超,孔忠弟,董涛,吴卿,折伟林,王小龙,徐鹏艳,李乾,李达,李聪聪. 5英寸锑化铟晶片加工及表征. 人工晶体学报. 2022(12): 2014-2021 .
![]() | |
2. |
孔忠弟,赵超,董涛. 锑化铟抛光片表面粗糙度优化研究. 红外. 2022(12): 20-25 .
![]() |