Citation: | WANG Guiquan, ZHANG Jinrong, SHAO Yi, ZHENG Wanxiang, TANG Yingjuan, HU Zhong, JIANG Xinping, LI Yansheng, LI Wei, WANG Qiaofang, ZI Zhenghua. Calculation of Optical Parameters of Diamond-like Carbon Film Based on Transmission Spectrum[J]. Infrared Technology , 2021, 43(5): 473-477. |
[1] |
李建超, 苏俊宏, 徐均琪. 类金刚石薄膜光学常数拟合模型的合理性研究[J]. 应用光学, 2004, 25(5): 56-59. DOI: 10.3969/j.issn.1002-2082.2004.05.017
LI Jiachao, SU Junhong, XU Junqi. Study of the reasonableness of fitting model concerning DLC film optical constant[J]. Appl. Opt., 2004, 25(5): 56-59. DOI: 10.3969/j.issn.1002-2082.2004.05.017
|
[2] |
章睿荣. 通过全光谱拟合法确定薄膜光学常数和厚度[D]. 杭州: 浙江大学, 2007.
ZHANG Ruirong. Determination of Optical Constants and Thickness of Thin Film with Whole Optical Spectrum Fitting[D]. Hangzhou: Zhejiang University, 2007.
|
[3] |
李国龙, 钟景明, 王立惠, 等. 反射光谱拟合法确定聚合物半导体薄膜光学常数和厚度[J]. 激光与光电子学进展, 2016, 53(4): 043101. https://www.cnki.com.cn/Article/CJFDTOTAL-JGDJ201604036.htm
LI Guolong, ZHONG Jingming, WANG Lihui, et al. Determination of optical constants and thickness of polymer semiconductor thin film with reflectivity fitting method[J]. Laser & Optoelectronics Progress, 2016, 53(4): 043101. https://www.cnki.com.cn/Article/CJFDTOTAL-JGDJ201604036.htm
|
[4] |
乔明霞. 薄膜光学常数和厚度的透射光谱法测定研究[D]. 成都: 四川大学, 2006.
QIAO Mingxia. Study on Determination of Optical Constants and Thickness of Thin Films by Transmission Spectrum Method[D]. Chengdu: Sichuan University, 2006.
|
[5] |
张奇志. 单层SiNx衰减型相移掩膜研究[D]. 成都: 四川大学, 2001.
ZHANG Qizhi. Study of the Attenuatal Phase Motion Coating of SiNx[D]. Chengdu: Dectoral Thesis, Chengdu: Sichuan University, 2001.
|
[6] |
Jakopic G, Par G, Papoueek W. Unified analytical inversion of reflectometric and ellipsometric data of absorbing media[J]. Appl. Op. t, 2000, 39(16): 2727-2732. DOI: 10.1364/AO.39.002727
|
[7] |
陈燕平, 余飞鸿. 薄膜厚度和光学常数的主要测试方法[J]. 光学仪器, 2006, 28(6): 84-88. DOI: 10.3969/j.issn.1005-5630.2006.06.017
CHEN Yanping, YU Feihong. Test methods for film thickness and optical constants[J]. Optical Instruments, 2006, 28(6): 84-88. DOI: 10.3969/j.issn.1005-5630.2006.06.017
|
[8] |
Chiu M, Lee J, Su D. Complex refractive-index measurement based on Fresnel's equations and the uses of heterodyne interferometry[J]. Appl. Opt. 1999, 38(9): 4047-4052 DOI: 10.1364/AO.38.004047
|
[9] |
杨天新, 邹豪, 王雷, 等. 棱镜耦合法确定条形波导的渐变折射率分布[J]. 中国激光, 2010, 37(3): 689-695. https://www.cnki.com.cn/Article/CJFDTOTAL-JJZZ201003019.htm
YANG Tianxin, ZOU Hao, WANG Lei, et al. Determining the graded -index profiles of channel wave guides by prism coupling method[J]. Chinese Journal of Lasers, 2010, 37(3): 689-695. https://www.cnki.com.cn/Article/CJFDTOTAL-JJZZ201003019.htm
|
[10] |
周天宇. 光学薄膜反演软件的研制与应用[D]. 长沙: 国防科学技术大学, 2010.
ZHOU Tianyu. Design and Application of Software of Reverse Engineering of Optical Coating[D]. Changsha: National University of DefenseTechnology, 2010.
|
[11] |
夏志林, 薛亦渝, 赵利, 等. 基于包络线法的薄膜光学常数分析[J]. 武汉理工大学学报: 信息与管理工程版, 2003, 25(5): 73-76. DOI: 10.3963/j.issn.1007-144X.2003.05.021
XIA Zhilin, XUE Yiyu, ZHAO Li, et al. Analysis of thin film's opticalparameters based on the envelope method[J]. Journal of Wuhan University of Technology: Information & Management Engineering, 2003, 25(5): 73-76. DOI: 10.3963/j.issn.1007-144X.2003.05.021
|
[12] |
李凯朋, 王多书, 李晨, 等. 光学薄膜参数测量方法研究[J]. 红外与激光工程, 2015, 44(3): 1048-1052. DOI: 10.3969/j.issn.1007-2276.2015.03.047
LI Kaipeng, WANG Duoshu, LI Chen, et al. Study on optical thin filmparameters measurement method[J]. Infrared and Laser Engineering, 2015, 44(3): 1048-1052. DOI: 10.3969/j.issn.1007-2276.2015.03.047
|
[13] |
Laaziza Y, Bennouna A, Chadburn N. Optical characterization of lowoptical thickness thin films from transmittance and back reflectance measurements[J]. Thin Solid Films, 2000, 372: 149-155. DOI: 10.1016/S0040-6090(00)00997-4
|
[14] |
侯典心, 路远, 宋福印. 基于全光谱拟合法的VO2薄膜光学常数计算[J]. 红外技术, 2017, 39(3): 243-249. http://hwjs.nvir.cn/article/id/hwjs201703008
HOU Dianxin, LU Yuan, SONG Fuyin. Optical constants of VO2 thin films based on whole optical spectrum fitting[J]. Infrared Technology, 2017, 39(3): 243-249. http://hwjs.nvir.cn/article/id/hwjs201703008
|
[15] |
闫威. 某些非线性色散方程的确定性与不确定性[D]. 广州: 华南理工大学, 2011: 28-35.
YAN Wei. Certainty and Uncertainty of Some Nonlinear Dispersion Equation[D]. Guangzhou: South China University of Technology, 2011.
|
[16] |
阳生红, 余招贤, 李辉道, 等. 模拟退火法在椭偏光谱数值反演中的应用[J]. 红外与毫米波学报, 2000, 19(5): 338-342. DOI: 10.3321/j.issn:1001-9014.2000.05.004
YANG Shenghong, YU Zhaoxian, LI Huidao, et al. Simulated annealing optimization algorithm for inverting ellipsometric spectra[J]. Infrared Millim. Waves, 2000, 19(5): 338-342. DOI: 10.3321/j.issn:1001-9014.2000.05.004
|
[17] |
Kirkpatrick, S Gelatt, C D Vecchi, M P Kirkpatrik S, et al. Optimization by using simulated annealing[J]. Science, 1983: 671-680.
|
[18] |
徐均琪, 冯小利. 多层薄膜光学常数的椭偏法研究[J]. 光电工程, 2009, 36(2): 29-33. https://www.cnki.com.cn/Article/CJFDTOTAL-GDGC200902008.htm
XU Junqi, FENG Xiaoli. Optical constants of multi-layer thin films investigated by spectroscopic ellipsometry[J]. Opto-Electronic Engineering, 2009, 36(2): 29-33. https://www.cnki.com.cn/Article/CJFDTOTAL-GDGC200902008.htm
|
[19] |
余平, 张晋敏. 椭偏仪的原理和应用[J]. 合肥学院学报: 自然科学版, 2007, 17(1): 87-89. https://www.cnki.com.cn/Article/CJFDTOTAL-HFXZ200701023.htm
YU Ping, ZHANG Jinmin. The principle and application of ellipsometery[J]. Journal of Hefei University: Natural Sciences Edition, 2007, 17(1): 87-89. https://www.cnki.com.cn/Article/CJFDTOTAL-HFXZ200701023.htm
|
[1] | ZHAO Qiang, LIU Shengjie, HAN Dongcheng, LIU Changyu, YANG Shizhi. Improved K-means Clustering-based Defect Detection Method for Photovoltaic Panels[J]. Infrared Technology , 2024, 46(4): 475-482. |
[2] | ZHANG Qingyu, FAN Yugang, GAO Yang. Defect Detection of Eddy-Current Thermography Based on Single-Scale Retinex and Improved K-means Clustering[J]. Infrared Technology , 2020, 42(10): 1001-1006. |
[3] | WANG Lingzhi, LEI Zhenggang, ZHOU Hao, YU Chunchao, YANG Zhixiong, DUAN Shaoli, NIE Dong. Long-wave Infrared Hyperspectral Image Classification Based on K-means of Spatial-Spectral Features[J]. Infrared Technology , 2020, 42(4): 348-355. |
[4] | JIANG Xiaolin, WANG Zhishe. Visible and Infrared Image Fusion Based on Structured Group and Double Sparsity[J]. Infrared Technology , 2020, 42(3): 272-278. |
[5] | SU Hongchao, HU Ying, HONG Shaozhuang. Edge Detection Based on Characteristics of Infrared Image and K-means[J]. Infrared Technology , 2020, 42(1): 81-85. |
[6] | WU Tianai, HUANG Shucai, YUAN Zhiwei, WU Yunrong, FENG Hui. NSCT Combined with SVD for Infrared Dim Target Complex Background Suppression[J]. Infrared Technology , 2016, 38(9): 758-764. |
[7] | Parameter Extraction of Extrinsic Capacitance of MOSFET at 77 K Cryogenic Temperature[J]. Infrared Technology , 2013, (1): 9-15. |
[8] | ZHAO Jing-yuan, WANG Li-ming, LIU Bin. The Research of Infrared Image Sequence Enhancement Based on SVD Algorithm[J]. Infrared Technology , 2009, 31(1): 47-50. DOI: 10.3969/j.issn.1001-8891.2009.01.013 |
[9] | LI Hui, QIAN Yun-sheng, CHANG Ben-kang, LIU Lei, XIA Yang, LI Shi-yi. The Research of K Factor for Signal-to-noise Ratio of LLLIntensifier[J]. Infrared Technology , 2007, 29(8): 488-490. DOI: 10.3969/j.issn.1001-8891.2007.08.015 |
[10] | ZHENG Lie-hua, YIN Da-yi, FENG Xin. Application for Offsetting Image Rotation "K Mirror" in COCTS[J]. Infrared Technology , 2007, 29(1): 17-21. DOI: 10.3969/j.issn.1001-8891.2007.01.005 |
1. |
曹世超,刘晓营,梁舒. 基于双密度双树复小波变换的红外图像降噪算法. 邢台职业技术学院学报. 2022(03): 93-97 .
![]() |