Advanced Search
中文
Volume 45 Issue 7
Jul.  2023
Turn off MathJax
Article Contents
Abstract
References
Related Articles
YIN Guoliang, DONG Rukun, YING Changyu, XIE Qiming, ZHANG Erping, ZHANG Hongmei, YU Wen. Research on Thin Silicon Windows Processing Technology for Infrared[J]. Infrared Technology , 2023, 45(7): 784-789.
Citation: YIN Guoliang, DONG Rukun, YING Changyu, XIE Qiming, ZHANG Erping, ZHANG Hongmei, YU Wen. Research on Thin Silicon Windows Processing Technology for Infrared[J]. Infrared Technology , 2023, 45(7): 784-789.
shu

Research on Thin Silicon Windows Processing Technology for Infrared

  • Yunnan North Optical Technology Co.Ltd., Kunming 650223, China

More Information
  • Received Date: April 10, 2022
  • Revised Date: May 10, 2022
    Graphical Abstract
    • Abstract
  • To meet the requirements of reduced load and high precision in photoelectric systems, thin silicon infrared windows were designed by increasing the surface accuracy compared with ordinary infrared window parts, and doubling the size of ordinary thin optical window parts (diameter to thickness ratio of 10:1). If the conventional process is used for processing, the parts are unable to meet the technical specifications. This study combines the processing advantages of classical polishing with the characteristics of silicon single-crystal materials; optimizes the adhesive ratio; adopts the adhesive point distribution method of bonding; and solves the processing problems of thin silicon infrared windows by changing relevant technical parameters, such as the spindle speed of the equipment and parts processing temperature. The processing of silicon windows by conventional and precision annealing were also compared.
    • FullText(HTML)
    • References (15)
  • [1]
    谢启明, 李奕威, 潘顺臣. 红外窗口和整流罩材料的发展和应用[J]. 红外技术, 2012, 34(10): 559-567. DOI: 10.3969/j.issn.1001-8891.2012.10.003

    XIE Qiming, LI Yiwei, PAN Shunchen. The development and application of the materials for infrared windows and domes[J]. Infrared Technology, 2012, 34(10): 559-567. DOI: 10.3969/j.issn.1001-8891.2012.10.003
    [2]
    张志坚. 红外光学材料的现状与发展[J]. 云南冶金, 2000, 29(5): 35-41. https://www.cnki.com.cn/Article/CJFDTOTAL-YNYJ200005010.htm

    ZHANG Zhijian. Statusquo and development of infrared optical materials[J]. Yunnan Metallurgy, 2000, 29(5): 35-41. https://www.cnki.com.cn/Article/CJFDTOTAL-YNYJ200005010.htm
    [3]
    彭利荣, 马占龙, 王高文, 等. 超薄光学元件精密加工关键技术[J]. 中国光学, 2015, 8(6): 964-970. https://www.cnki.com.cn/Article/CJFDTOTAL-ZGGA201506014.htm

    PENG Lirong, MA Zhanlong, WANG Gaowen, et al. Key technology of ultra-thin optical element precision manufacture[J]. Chinese Optics, 2015, 8(6): 964-970. https://www.cnki.com.cn/Article/CJFDTOTAL-ZGGA201506014.htm
    [4]
    CAI Li, GENG Sujie, FU Xiuhua. Optical Parts Processing Technology (2nd Edition)[M]. Beijing: The Publishing House of Ordnance Industry, 2006.
    [5]
    李晓奇, 张云琦. 影响古典法抛光的工艺因素[J]. 科技资讯, 2011(31): 88. https://www.cnki.com.cn/Article/CJFDTOTAL-ZXLJ201131069.htm

    LI Xiaoqi, ZHANG Yunqi. Influence the craft factor of classical polishing[J]. Science & Technology Information, 2011(31): 88. https://www.cnki.com.cn/Article/CJFDTOTAL-ZXLJ201131069.htm
    [6]
    王新海, 马瑾, 张永军. 浅谈光学零件的超光滑表面加工方法[J]. 山东工业技术, 2018(6): 28. https://www.cnki.com.cn/Article/CJFDTOTAL-SDGJ201806026.htm

    WANG Xinhai, MA Jin, ZHANG Yongjun. Discussion on the processing method of ultra-smooth surface of optical parts[J]. Shandong Industrial Technology, 2018(6): 28. https://www.cnki.com.cn/Article/CJFDTOTAL-SDGJ201806026.htm
    [7]
    袁礼华, 许健, 董旭坤. 平面玻璃窗口片光学表面零级疵病抛光工艺研究[J]. 半导体光电, 2013, 34(2): 251-254. https://www.cnki.com.cn/Article/CJFDTOTAL-BDTG201302021.htm

    YUAN Lihua, XU Jian, DONG Xukun. Research on the polishing process of optical window high precision surface[J]. Semiconductor Optoelectronics, 2013, 34(2): 251-254. https://www.cnki.com.cn/Article/CJFDTOTAL-BDTG201302021.htm
    [8]
    王健, 许乔, 石琦凯. 薄型光学元件的数控抛光技术研究[C]//全国激光科学技术青年学术交流会, 2001: 354-357.

    WANG Jian, XU Qiao, SHI Qikai. Research on NC polishing technology for thin optical components[C]//National Laser Science and Technology Youth Academic Exchange Conference, 2001: 354-357.
    [9]
    周艳. 古典抛光中影响超光滑质量主要因素的分析[J]. 化学工程与装备, 2008(10): 89-92. https://www.cnki.com.cn/Article/CJFDTOTAL-FJHG200810025.htm

    ZHOU Yan. Analysis of main factors affecting ultra-smooth quality in classical polishing [J]. Chemical Engineering & Equipment, 2008(10): 89-92. https://www.cnki.com.cn/Article/CJFDTOTAL-FJHG200810025.htm
    [10]
    王健. 大口径高精度光学元件数控抛光技术研究[D]. 成都: 四川大学, 2004.

    WANG Jian. Studies on computer controlled optical finishing for large aperture high precision optics[D]. Chengdu: Sichuan University, 2004.
    [11]
    王朋, 陈亚, 宣斌, 等. 大口径光学元件的机械手抛光[J]. 光学精密工程, 2010, 18(5): 1077-1085. https://www.cnki.com.cn/Article/CJFDTOTAL-GXJM201005010.htm

    WANG Peng, CHEN Ya, XUAN Bin, et al. Polishing large aperture mirrors by manipulator[J]. Optics and Precision Engineering, 2010, 18(5): 1077-1085. https://www.cnki.com.cn/Article/CJFDTOTAL-GXJM201005010.htm
    [12]
    李晓奇, 梁琳麟. 薄型光学零件加工中难点的研究[J]. 光电技术应用, 2016, 31(6): 82-86. https://www.cnki.com.cn/Article/CJFDTOTAL-GDYG201606018.htm

    LI Xiaoqi, LIANG Linlin. Research on thin optical elements processing difficulties[J]. Electro-Optic Technology Application, 2016, 31(6): 82-86. https://www.cnki.com.cn/Article/CJFDTOTAL-GDYG201606018.htm
    [13]
    杨静, 胡忠, 王兴华, 等. 大口径硅透镜高精度抛光工艺的研究[J]. 云光技术, 2013, 45(2): 24-27.

    YANG Jing, HU Zhong, WANG Xinghua, et al. Study on high precision polishing process of large Aperture Silicon lens[J]. Yun Guang Ji Shu, 2013, 45(2): 24-27.
    [14]
    陈琦, 付秀华, 贾宗合, 等. 硫化锌晶体加工工艺技术研究[J]. 长春理工大学学报: 自然科学版, 2013, 36(3-4): 120-123. https://www.cnki.com.cn/Article/CJFDTOTAL-CGJM2013Z2036.htm

    CHEN Qi, FU Xiuhua, JIA Zonghe, et al. Research on processing technology of ZnS crystal[J]. Journal of Changchun University of Science and Technology: Natural Science Edition, 2013, 36(3-4): 120-123. https://www.cnki.com.cn/Article/CJFDTOTAL-CGJM2013Z2036.htm
    [15]
    李军. 红外锗透镜加工工艺研究[D]. 西安: 西安工业大学, 2012.

    LI Jun. Study for Infrared Germanium Lens Processing Technology[D]. Xi'an: Xi'an Technological University, 2012.
    • Related Articles

  • Related Articles

    [1]YUAN Shouzhang, ZHAO Wen, KONG Jincheng, WANG Jingyu, JIANG Jun, ZHAO Zenglin, JI Rongbin. Effect of in-Situ Post-annealing on the Second Phase Inclusion Defects[J]. Infrared Technology , 2021, 43(7): 615-621.
    [2]SONG Linwei, WU Jun, LI Pei, ZHANG Yang, MAO Xufeng, LI Dongsheng. The Annealing Technology of HgCdTe Materials[J]. Infrared Technology , 2016, 38(3): 239-245.
    [3]SONG Li-yuan, TANG Li-bin, JI Rong-bin, CHEN Xue-mei, LI Xiong-jun. Effect of Annealing on Structural Properties and surface morphologies of ZnO:Al Thin Films[J]. Infrared Technology , 2010, 32(11): 659-662. DOI: 10.3969/j.issn.1001-8891.2010.11.010
    [4]WAN rui-min, HUANG hui, CHEN xue-mei, GONG xiao-xia, HU zan-dong, JI rong-bin. Research on the Effects of the Precipitates in CdZnTe Wafer by Open-tube Annealing Method[J]. Infrared Technology , 2010, 32(10): 579-582. DOI: 10.3969/j.issn.1001-8891.2010.10.006
    [5]LI Xiong-jun, KONG Jin-cheng, WANG Guang-hua, YU Lian-jie, KONG Ling-de, YANG Li-li, QIU feng, LI Cong, JI Rong-bin. The Effect of Annealing on the Microstructure and Photosensitivity of Amorphous MCT Films[J]. Infrared Technology , 2010, 32(5): 255-258. DOI: 10.3969/j.issn.1001-8891.2010.05.002
    [6]SU Shuan, LI Yan-hui, ZHOU Xu-chang, YANG Chun-zhang, TAN Ying, GAO Li-hua, LI Quan-bao. A Study of In Situ Annealing of MBE Growth Hg1-xCdxTe[J]. Infrared Technology , 2009, 31(1): 5-7. DOI: 10.3969/j.issn.1001-8891.2009.01.002
    [7]ZHANG Peng-ju, ZHAO Zeng-lin, HU Zan-dong, WAN Rui-min, YUE Quan-ling, WANG Xiao-wei, JI Rong-bin. Effect to Properties of CdZnTe Wafer by Cd Vapor Annealing[J]. Infrared Technology , 2005, 27(5): 379-383. DOI: 10.3969/j.issn.1001-8891.2005.05.008
    [8]Effect of Annealing Temperature on Ferroelectric Barium Strontium Titanate Thin Films[J]. Infrared Technology , 2003, 25(4): 88-91. DOI: 10.3969/j.issn.1001-8891.2003.04.022
    [9]A Study on Regrowning of Ge/Si Heterostructures Made By Magnitron Sputter Deposition after Annealed[J]. Infrared Technology , 2002, 24(2): 34-36,40. DOI: 10.3969/j.issn.1001-8891.2002.02.009
    [10]ZHANG Yan, LI Xiang-yang, JIANG Run-qing, SUN Yu-ming, FANG Jia-xiong. The Study of Arsenic Implanted HgCdTe for Laser Annealing[J]. Infrared Technology , 2000, 22(4): 26-29. DOI: 10.3969/j.issn.1001-8891.2000.04.007

Catalog

    Get Citation
    PDF
    XML
    Article views (120) PDF downloads (42) Cited by()
    Related

    Copyright © 《Infrared Technology》Editorial Office滇ICP备12000354号-3

    Supported by: Beijing Renhe Information Technology Co., Ltd.  Baidu Analytics

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return