Research Progress of an Electron Bombarded Active Pixel Sensor
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摘要:
电子轰击型有源像素传感器（electron bombarded active pixel sensor, EBAPS）是一种电子轰击型的数字化微光器件，低功耗、高灵敏度、适用于极低照度探测。本文从EBAPS原理出发，以传感器阴极、阳极内部结构为着手点，阐述EBAPS从光信号输入到数字图像输出的工作过程，分析EBAPS光学系统的结构特点，结合Intevac公司系列EBAPS产品综述EBAPS的发展迭代与应用。最后，总结影响EBAPS传感器性能的各方面因素并展望器件的发展趋势。
Abstract:An electron bombarded active pixel sensor(EBAPS) is a novel, digital low-light device characterized by its low power consumption, high sensitivity, and suitability for extreme low-light detection. This study begins with the principles of the EBAPS, focusing on the internal structure of the sensor's cathode and anode to elucidate the working process of the EBAPS from its input of optical signals to its output of digital images. This study further analyzes the structural features of the EBAPS optical system and, combined with a series of EBAPS products from the Intevac Corporation, reviews the development iterations and applications of the EBAPS. Finally, this study summarizes the various factors affecting the performance of EBAPS sensors and discusses the development trends of such devices.
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Keywords:
- EBAPS /
- digital low-light device /
- extreme low illumination detection
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低照度成像技术是解决低光照（具体指0.1 lux以下）环境获取视频图像的技术。按照是否包含真空系统，低照度成像器件主要分为三类：第一类是利用外光电效应的真空光电子成像器件，比如基于多碱材料体系的超二代微光像增强器、基于GaAs材料体系的三代微光像增强器；第二类是利用内光电效应的固体成像器件，比如基于硅材料体系的电子倍增CCD（EMCCD）/CMOS（EMCMOS）和低照度CMOS成像器件、基于Ⅲ-Ⅴ族InP/InGaAs材料体系的短波红外InGaAs探测器等；第三类是结合真空和固体器件优势的混合型成像器件，如电子轰击CCD（EBCCD）、电子轰击有源像素CMOS器件的EBAPS。为促进我国低照度成像技术尤其是新一代昼夜通用高灵敏度图像传感器EBAPS的发展，2024年10期，《红外技术》推出了“低照度成像技术”专栏，共收录6篇学术论文，其中2篇文章以EBAPS为主题，1篇综述了EBAPS的研究进展，另1篇提出连通域检测算法筛选高亮噪点区域和异常像素点自适应中值替代的离散系数测试方法并研制了EBAPS闪烁噪声系统；与此形成对照的是1篇微光像增强器的闪烁噪声测试方法，结合了离散系数与Harris角点检测；1篇片上集成偏振单元的EMCCD器件，还有2篇聚焦于低照度图像处理方法。专栏旨在为我国相关科研人员和广大读者提供学术参考，为低照度成像技术的创新发展提供一些新思路和新手段。
最后，感谢各位审稿专家和编辑的辛勤工作。
——王岭雪 -
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图 8 分波段定焦光学成像：可见光阴极焦面夜间模式（上）；近红外阳极焦面白昼模式（下）
Figure 8. Optical imaging of segmented fixed focus: Visible light cathode focal plane with night mode(above)(b) Near-infrared anodic focal plane with day mode(below)
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图 9 宽波段调焦光学成像：宽波段阴极焦面夜间模式（上）；宽波段阳极焦面白昼模式（下）
Figure 9. Wide-band focused optical imaging: (a) Wide-band cathode focal plane with night mode(above)(b) Wide-band anodic focal plane with day mode(below)
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图 16 北方夜视股份9B-3EBAPS传感器光谱特性曲线
Figure 16. Northern Night Vision shares 9B-3EBAPS sensor spectral characteristic curve
Function Product NightVista ISIE6 ISIE10 ISIE11 ISIE19 Pixel 640×480 1280×1024 1280×1024 1640×1240 1920×1920 Pixel size/µm 12×12 6.7×6.7 10.8×10.8 10.8×10.8 9.11×9.11 Sensitive size/mm 9.8 11 17.7 22.2 24.7 Frequency/fps 30 27.5 37 60 160 
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