Abstract: An electron bombarded active pixel sensor(EBAPS) is a novel, digital low-light device characterized by its low power consumption, high sensitivity, and suitability for extreme low-light detection. This study begins with the principles of the EBAPS, focusing on the internal structure of the sensor's cathode and anode to elucidate the working process of the EBAPS from its input of optical signals to its output of digital images. This study further analyzes the structural features of the EBAPS optical system and, combined with a series of EBAPS products from the Intevac Corporation, reviews the development iterations and applications of the EBAPS. Finally, this study summarizes the various factors affecting the performance of EBAPS sensors and discusses the development trends of such devices.