PID Control Technology in the Laser Etching System for Ferroelectric Materials
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引用本文: | 夏丽昆, 侯阳, 李银柱, 太云见, 袁俊, 莫启元. 铁电材料激光刻蚀系统中的PID微机控制技术[J]. 红外技术, 2006, 28(8): 489-492. DOI: 10.3969/j.issn.1001-8891.2006.08.014 |
Citation: | XIA Li-kun, HOU Yang, LI Yin-zhu, TAI Yun-jian, YAN jun, MO Qi-yuan. PID Control Technology in the Laser Etching System for Ferroelectric Materials[J]. Infrared Technology , 2006, 28(8): 489-492. DOI: 10.3969/j.issn.1001-8891.2006.08.014 |