Advanced Search
中文
Volume 44 Issue 11
Nov.  2022
Turn off MathJax
Article Contents
Abstract
References
LI Yansheng, TANG Yingjuan, LI Rujie, XU Hong, SU Bin, HE Yuchun, CHENG Jinghui, CHEN Yijun, WANG Qiaofang. Aspheric Surface Measurement Based on Infrared Laser Interferometer[J]. Infrared Technology , 2022, 44(11): 1243-1247.
Citation: LI Yansheng, TANG Yingjuan, LI Rujie, XU Hong, SU Bin, HE Yuchun, CHENG Jinghui, CHEN Yijun, WANG Qiaofang. Aspheric Surface Measurement Based on Infrared Laser Interferometer[J]. Infrared Technology , 2022, 44(11): 1243-1247.
shu

Aspheric Surface Measurement Based on Infrared Laser Interferometer

  • 1.

    Kunming North Infrared Technology Co. Ltd, Kunming 650217, China

  • 2.

    Kunming Institute of Physics, Kunming 650223, China

  • 3.

    College of Optoelectronic Engineering, Yunnan Open University, Kunming 650223, China

  • 4.

    The second military representative office in Kunming of the armament department in Chongqing, Kunming 650032, China

More Information
  • Received Date: July 04, 2022
  • Revised Date: September 20, 2022
    Graphical Abstract
    • Abstract
  • Here, a novel method for measuring an aspheric surface using an infrared laser interferometer is proposed. The model is divided into three modules. First, the wave front aberration between the aspheric surface and the standard spherical surface was measured by an infrared laser interferometer. Then, the theoretical value of the wave image difference between the aspheric surface and the standard spherical surface was calculated according to the aspheric equation. Finally, the surface shape deviation of the aspheric surface was calculated. To verify the validity and reliability of this method, the surface shape error of the same paraboloidal mirror was measured using the ZYGO visible light interferometer and the compensation mirror method. The obtained results indicate that these two measurement methods were identical. Hence, the novel method is convenient, fast, and highly versatile and can be used to test aspheric surfaces during processing.
    • FullText(HTML)
    • References (8)
  • [1]
    Hall P R. The role of asphericity in optical design[C]//Procof SPIE, 1990, 1320: 384-393.
    [2]
    尤越, 王乔方, 字正华, 等. 一种基于Matlab的非球面光学元件面形参数测试技术[J]. 红外技术, 2014, 36(4): 331-335. http://hwjs.nvir.cn/article/id/hwjs201404016

    YOU Yue, WANG Qiaofang, ZI Zhenghua. Test technique surface shape aspheric optics parameters based MatLab[J]. Infrared Technology, 2014, 36(4): 331-335. http://hwjs.nvir.cn/article/id/hwjs201404016
    [3]
    蒋剑锋, 何永辉, 赵万生. 表面三维微观形貌检测技术及其发展[J]. 中国机械工程, 1999, 10(12): 1418-1421. https://www.cnki.com.cn/Article/CJFDTOTAL-ZGJX199912032.htm

    JIANG Jianfeng, HE Yonghui, ZHAO Wansheng. Surface 3D micro topography measurement technology and its development[J]. China Mechanical Engineering, 1999, 10(12): 1418-1421. https://www.cnki.com.cn/Article/CJFDTOTAL-ZGJX199912032.htm
    [4]
    高宏, 辛企明, 李爱民, 等. 非球面干涉测量方法的原理误差分析[J]. 应用光学, 1993, 14(3): 61-64. https://www.cnki.com.cn/Article/CJFDTOTAL-YYGX199303021.htm

    GAO H, XIN Q M, LI A M, et al. Error analysis of interferometric method for aspheric surface testing[J]. Journal of Applied Optics, 1993, 14(3): 61-64. https://www.cnki.com.cn/Article/CJFDTOTAL-YYGX199303021.htm
    [5]
    薛栋林, 张忠玉, 郑立功, 等. 大口径碳化硅材料凸非球面反射镜的检验[J]. 光学精密工程, 2008, 16(12): 2491-2496. https://www.cnki.com.cn/Article/CJFDTOTAL-GXJM200812035.htm

    XUE D L, ZHANG ZH Y, ZHENG L G, et al. Testing methods for large aperture convex SiC as phere mirror[J]. Opl. Precision Eng., 2008, 16(12): 2491-2496. https://www.cnki.com.cn/Article/CJFDTOTAL-GXJM200812035.htm
    [6]
    杨佳文, 黄巧林, 韩友民. Zernike多项式在拟合光学表面面形中的应用及仿真[J]. 航天返回与遥感, 2010, 31(5): 49-56. https://www.cnki.com.cn/Article/CJFDTOTAL-HFYG201005012.htm

    YANG Jiawen, HUANG Qiaolin, HAN Youmin. Application and simulation in fitting optical surface with Zernike polynomial[J]. Spacecraft Recovery & Remote Sensing, 2010, 31(5): 49-56. https://www.cnki.com.cn/Article/CJFDTOTAL-HFYG201005012.htm
    [7]
    PAN Junhua. The Design, Manufacture and Test of the Aspherical Optical Surface[M]. Suzhou: Soochow University Press, 2004.
    [8]
    陈进榜, 陈磊, 王青, 等. 大孔径移相式CO2激光干涉仪[J]. 中国激光, 1998, A25(1): 31-36. https://www.cnki.com.cn/Article/CJFDTOTAL-JJZZ801.007.htm

    CHEN Jinbang, CHEN Lei, WANG Qing, et al. A large aperture phase shifting CO2 laser interferometer[J]. Chinese J. Laser, 1998, A25(1): 31-36. https://www.cnki.com.cn/Article/CJFDTOTAL-JJZZ801.007.htm
    • Related Articles

Catalog

    Get Citation
    PDF
    XML
    Article views (178) PDF downloads (189) Cited by()
    Related

    Copyright © 《Infrared Technology》Editorial Office滇ICP备12000354号-3

    Supported by: Beijing Renhe Information Technology Co., Ltd.  Baidu Analytics

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return