WANG Guiquan, XU Zhiwen, DUAN Yongjin, SHI Haokun, JIANG Xuke, LI Yansheng, ZHANG Yuxuan, ZHANG Jie. An Infrared Micro Scanner Measurement and Calibration Method Based on Image Processing[J]. Infrared Technology , 2022, 44(9): 964-971.
Citation: WANG Guiquan, XU Zhiwen, DUAN Yongjin, SHI Haokun, JIANG Xuke, LI Yansheng, ZHANG Yuxuan, ZHANG Jie. An Infrared Micro Scanner Measurement and Calibration Method Based on Image Processing[J]. Infrared Technology , 2022, 44(9): 964-971.

An Infrared Micro Scanner Measurement and Calibration Method Based on Image Processing

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  • Received Date: November 18, 2021
  • Revised Date: December 15, 2021
  • In infrared imaging systems, in which the core is an infrared focal plane array, a microscanner can enhance the spatial resolution of the entire system. To test microscanners, this study developed a measurement and calibration method based on image processing and built a system to measure and calibrate microscanners. Using a microscanner as a test subject, the test results indicate that the proposed method has a significant effect on the measurement accuracy, repetition accuracy, and uncertainty. The method can provide technical support for the design and manufacture of microscanners.
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