光学非球面面形轮廓检测技术

焦松峰; 谢启明; 刘尧; 王一卓; 范威; 游津京; 杨永华; 张宸钢

光学非球面面形轮廓检测技术

1.
长春理工大学机电工程学院，吉林长春 130012
2.
云南北方光学科技有限公司，云南昆明 650200
3.
昆明物理研究所，云南昆明 650221

详细信息

作者简介:
焦松峰（1995-），男，硕士生，主要从事单点金刚石车削和非球面检测方面的研究。E-mail：1639548057@qq.com

通讯作者:
谢启明（1966-），男，研究员高级工程师，硕士，主要从事单点金刚石切削工艺、复杂表面及自由曲面超精密加工工艺、光学零件的检测技术方面的研究。E-mail：646010668@qq.com

中图分类号: TH74
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出版历程
- 收稿日期: 2022-09-16
- 修回日期: 2022-12-11
- 刊出日期: 2023-05-19

Optical Aspheric Surface Profile Testing Technology

1.
College of Mechanical and Electrical Engineering, Changchun University of Science and Technology, Changchun 130012, China
2.
Yunnan Northern Optical Technology Co. LTD., Kunming 650200, China
3.
Kunming Institute of Physics, Kunming 650221, China

摘要

摘要: 随着科技的进步，尖端产品和先进光电系统对光学系统的成像质量要求越来越高，光学非球面元件能有效地校正像差、减少系统所需光学元件数量、减轻系统重量，因此被广泛应用。其特殊的面形特征决定了它的加工和检测相对于球面更加困难，而检测精度直接决定了加工精度，非球面检测技术的重要性显而易见。根据测量原理对光学非球面的检测技术进行了概述；根据目前直接面形轮廓法在光学非球面的加工中应用最广的情况，结合最新检测手段，重点介绍了非球面直接面形轮廓法测量技术；并介绍了近年来日益受到人们关注的自由曲面及面形轮廓法在自由曲面检测的应用；最后总结了光学非球面检测技术的现状和发展趋势。
- 非球面 /
- 检测精度 /
- 直接面形轮廓法 /
- 自由曲面
Abstract: With the progress of science and technology, cutting-edge products and advanced photoelectric systems have increasingly higher requirements regarding the imaging quality of the optical system. Optical aspheric elements, which are widely used, can effectively correct the aberration, reduce the number of optical elements required by the system, and reduce the weight of the system. Because of the specific surface characteristics, machining and testing such systems are more difficult than for spherical particles; the testing accuracy directly determines the processing accuracy, and the importance of aspheric testing technology is obvious. Herein, the testing technology of optical aspheric surface is summarized according to measuring principle; As direct surface profilometry is widely used in optical aspheric surface machining, combined with the latest testing methods, the measurement technology of aspheric surface direct surface profilometry is mainly introduced; The application of freeform surface and surface profilometry in freeform surface testing, which has attracted increasing attention in recent years, is introduced; Finally, the present situation and development trend of aspheric surface testing technology are summarized.
- aspherical surface /
- testing accuracy /
- direct surface profilometry /
- free-form surface

HTML全文

图 1 非球面光学元件示意图

Figure 1. Diagram of aspherical optical elements

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图 2 接触式轮廓仪测量原理

Figure 2. Measuring principle of contact profilometer

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图 3 接触式轮廓仪

Figure 3. Contact profilometer

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图 4 NMF轮廓仪及测量原理

Figure 4. NMF profilometer and measuring principle

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图 5 Luphoscan轮廓仪及测量原理

Figure 5. Luphoscan profilometer and measurement principle

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图 6 LuphoScan测量硅自由曲面

Figure 6. LuphoScan measures silicon free-form surfaces

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图 7 NMF测量凸自由曲面^[17]

Figure 7. NMF measures convex free-form surfaces^[17]

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