The Research Progress in Type Ⅱ Superlattices Infrared Focal Plane Array Detectors
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摘要: 近几年,二类超晶格红外探测器在材料生长、器件结构设计、器件制备上经历了快速的发展,使得二类超晶格成为除碲镉汞外最受关注的红外探测器材料。本文简要介绍了二类超晶格的优势,总结了国际上二类超晶格红外探测器研究进展,回顾了二类超晶格红外探测器的技术发展历程,并分析了国内二类超晶格材料与器件中存在的技术问题。Abstract: In recent years, the type Ⅱ superlattices (T2SL) infrared detector has experienced incredible improvements in material growth, device structure design, device fabrication techniques, which make the T2SL become the most popular infrared detector material, besides HgCdTe. This article briefly introduces the advantage of the T2SL material, summarizes the international research status in T2SL-based photodetectors, reviews the history of technology development of T2SL-based photodetectors and analyzes the drawback of the research of T2SL material and device technology in China.
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Key words:
- type Ⅱ superlattices /
- infrared detector /
- focal-plane arrays (FPAs)
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表 1 不同探测波段探测器及焦平面性能参数
Table 1. Performance parameter of detector and FPA under different detection regime
Research Institute Device structure Operation temperature/K Cut-off wavelength/μm Quantum efficiency/% Dark current/A/cm-2 Detectivity/Jones FPA format/pitch NETD/mK Operability/% Publish year MWIR AIM n-i-p 77 5.4
(5% cutoff)30 256×256/40 μm 11.1 99.42 2005 Northwestern University p-π-M-N 150 4.2 1.05×1012 320×256 11.0@120 K 2011 HRL 150 5.0 50 without AR coating 6.3×10-6 2 k×1 k/5 μm < 20@150 K, f/2.3, with subframe
averaging99.9 2017 JPL nBn 150 5.4 52 4.5×10-5 640×512/24 μm 18.7 99.7 2018 LWIR Northwestern University p-π-M-N 77 11.0 >50 5.5×10-5 1 k×1 k/18 μm 27 @81 K
19@68 K2010 JPL CBIRD 80 11.5 21 1 k×1 k/17.5 μm 53 2010 JPL nBn 60 11.2 37 1×10-5 640×512 21 99.7% 2018 SCD pBp 77 9.5 ~50 4.4×10-5 640×512/18 μm 15 (with 8 frame average) >99% 2016 Dual color IR AIM 77 4 (Blue)
5 (Red)2.2×10-7
1.9×10-7384×288/40 μm 29.5(Blue)
16.5 (Red)2006 Northwestern University 5.2 @160 K for MW
11.2
@77K for LW40-50@160K for MW
> 30
@77K for LW7.0×1012@160K for MW
2.0×1011
@77K for LW320×256 10 (MW)
30 (LW)2012 HRL 80 1280×720/
12μm27.44 (MW)
27.62(LW)99.4(MW)
99.09(LW)2017 Note:Unless otherwise indicated, the cut-off wavelength refers to 50% cut-off wavelength -
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