非制冷红外探测器真空寿命研究

孙俊伟, 孔祥盛, 胡汉林, 刘继伟, 王兴祥, 李松华

孙俊伟, 孔祥盛, 胡汉林, 刘继伟, 王兴祥, 李松华. 非制冷红外探测器真空寿命研究[J]. 红外技术, 2024, 46(12): 1448-1452.
引用本文: 孙俊伟, 孔祥盛, 胡汉林, 刘继伟, 王兴祥, 李松华. 非制冷红外探测器真空寿命研究[J]. 红外技术, 2024, 46(12): 1448-1452.
SUN Junwei, KONG Xiangsheng, HU Hanlin, LIU Jiwei, WANG Xingxiang, LI Songhua. Vacuum Life of Uncooled Infrared Detector[J]. Infrared Technology , 2024, 46(12): 1448-1452.
Citation: SUN Junwei, KONG Xiangsheng, HU Hanlin, LIU Jiwei, WANG Xingxiang, LI Songhua. Vacuum Life of Uncooled Infrared Detector[J]. Infrared Technology , 2024, 46(12): 1448-1452.

非制冷红外探测器真空寿命研究

详细信息
    作者简介:

    孙俊伟(1995-),研发工程师,硕士,研究方向:非制冷红外探测器封装设计。E-mail:17865190557@163.com

  • 中图分类号: TN215

Vacuum Life of Uncooled Infrared Detector

  • 摘要:

    非制冷红外探测器近年来在军用和民用领域快速发展,探测器的真空封装影响着组件的寿命,真空失效也是探测器最常见的失效模式。本文在非制冷红外探测器陶瓷封装的基础上,分析封装结构和工艺,以阿伦尼乌斯方程为加速寿命模型,研究吸气剂面积和胶水热失重对探测器内部真空度的影响。实验结果表明,增大吸气剂面积增加吸气量、选择低热失重参数胶水减少挥发性气体释放均有助于探测器内部真空度的维持,延长探测器的真空寿命。本文为非制冷红外探测器真空封装的研究提供了参考意义。

    Abstract:

    Uncooled infrared detectors have been developed rapidly in the military and civil fields. The vacuum packaging of detectors affects the life of components, with vacuum failure being the most common failure mode. In this study, based on the ceramic packaging of an uncooled infrared detector, the packaging structure and technology were analyzed, and the effects of the getter area and glue thermal weight loss on the degree of vacuum in the detector were studied using the Arrhenius equation as an accelerated life model. The experimental results show that increasing the getter area and volume, as well as using glue with low TG parameters to reduce the release of volatile gases, helps maintain the vacuum degree inside the detector and prolongs its vacuum life. This study provides a reference for the vacuum packaging of uncooled infrared detectors.

  • 图  1   非制冷红外陶瓷探测器

    Figure  1.   Uncooled infrared ceramic detector

    图  2   氦质谱检漏原理

    Figure  2.   Helium mass spectrometry leak detection principle

    图  3   不同吸气剂面积老化平均SiTF变化率

    Figure  3.   Average SiTF change rate with different getter area aging

    图  4   不同热失重参数胶水老化SiTF平均变化率

    Figure  4.   Average change rate of aging SiTF with different thermogravimetric parameters

    表  1   探测器漏率检测结果

    Table  1   Detector leakage rate test results

    Detector number 1 2 3 4 5 6
    Leak rate/(Pa ⋅m3⋅s-1) 3.8×10-10 7.1×10-10 2.1×10-10 2.6×10-10 3.8×10-10 6.4×10-10
    Detector number 7 8 9 10 11 12
    Leak rate/(Pa ⋅m3⋅s-1) 3.5×10-10 6.1×10-10 3.9×10-10 7.1×10-10 4.6×10-10 5.3×10-10
     
    Detector number 13 14 15 16 17 18
    Leak rate/(Pa ⋅m3⋅s-1) 6.6×10-10 4.5×10-10 6.8×10-10 7.2×10-10 2.8×10-10 3.5×10-10
    下载: 导出CSV

    表  2   不同吸气剂面积寿命实验数据

    Table  2   Life experiment data of different getter area

    Detector number Getter area /cm2 First test SiTF
    /(cnts/K)
    Seven years SiTF
    /(cnts/K)
    SiTF
    rates
    Ten years SiTF
    /(cnts/K)
    SiTF rates Fourteen years SiTF
    /(cnts/K)
    SiTF rates
    1 85.6 172.051 163.167 −5.16% 129.854 −24.53% 114.550 −33.42%
    4 175.231 169.653 −3.18% 130.264 −25.66% 116.151 −33.72%
    7 176.569 170.622 −3.37% 130.598 −26.04% 115.43 −34.63%
    2 95.2 176.133 173.063 −1.74% 168.880 −4.12% 142.120 −19.31%
    5 177.549 174.353 1.80% 167.664 −5.57% 140.536 −20.85%
    8 173.156 170.256 1.67% 162.731 −6.02% 139.561 −19.40%
    3 180.8 177.998 178.884 0.50% 178.339 0.19% 171.989 −3.38%
    6 175.443 176.853 0.80% 175.587 0.08% 170.464 −2.84%
    9 172.831 174.669 1.06% 173.211 0.22% 168.100 −2.74%
    下载: 导出CSV

    表  3   不同热失重参数胶水寿命试验数据

    Table  3   Life test data with different thermogravimetric parameters

    Detector number Thermogravimetric parameters /(%) First test SiTF
    /(cnts/K)
    Seven years SiTF
    /(cnts/K)
    SiTF
    rates
    Ten years SiTF
    /(cnts/K)
    SiTF rates Fourteen years SiTF
    /(cnts/K)
    SiTF rates
    10 0.7 176.537 147.948 −16.19% 130.854 −25.88% 117.550 −33.41%
    13 175.325 149.665 −14.64% 132.123 −24.64% 115.021 −34.40%
    16 177.981 150.012 −15.71% 133.587 −24.94% 117.498 −33.98%
    11 0.4 176.061 172.877 −1.81% 169.667 −3.63% 140.120 −20.41%
    14 175.997 172.647 −1.90% 168.338 −4.35% 141.527 −19.59%
    17 179.324 175.297 −2.25% 172.578 −3.76% 144.470 −19.44%
    12 0.25 178.097 176.884 −0.68% 177.081 −0.57% 172.794 −2.98%
    15 176.021 175.462 −0.32% 175.237 −0.45% 172.631 −1.93%
    18 175.987 175.031 −0.54% 176.234 0.14% 171.015 −2.83%
    下载: 导出CSV
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  • 收稿日期:  2023-07-31
  • 修回日期:  2023-09-14
  • 刊出日期:  2024-12-19

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