Thermal Integration Analysis of Optical Machines for Axis Alignment Test Systems
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摘要:
轴对准测试系统是一种应用大口径平行光管法来测量光轴平行性的重要仪器，系统焦距为4800 mm，口径为600 mm。在测试过程中，由于焦距长、口径大，环境温度的变化引起的各元件的微小变形都会影响系统的成像质量及测试精度。因此，需要对该系统进行光机热集成分析。建立了轴对准测试系统的有限元分析模型，分析了稳态温度场、温度梯度场下系统的热变形，利用Zernike多项式对热变形后的镜面进行面型拟合，将拟合系数导入光学设计软件，得到不同温度变化下对轴对准测试系统的影响，通过实验验证了仿真结果的准确性。结果表明：稳态温度场下，在设计参数要求的温度范围内，光学系统波像差均小于λ/10（λ＝632.8 nm），光轴平行性检测精度满足0.02 mrad；温度梯度场对系统影响更大，需将系统内外温差控制在±3℃内。
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关键词:
- 轴对准测试系统 /
- 光机热集成分析 /
- 有限元分析 /
- Zernike多项式 /
- 面型精度
Abstract:The axis alignment test system is an important instrument for measuring the parallelism of optical axes by applying the method of large aperture parallel light tubes, with a focal length of 4800 mm and an aperture of 600 mm. During the test process, due to the long focal length and large aperture, the small deformation of each component caused by the change of the ambient temperature will affect the imaging quality of the system and the test accuracy. Therefore, an opto-mechanical thermal integration analysis of the system is required. The finite element analysis model of the shaft alignment test system was established, the thermal deformation of the system under steady state temperature field and temperature gradient field was analyzed, the Zernike polynomials were used to fit the surface shape of the mirror after thermal deformation, and the fitting coefficients were imported into the optical design software to get the effects on the shaft alignment test system under different temperature changes, and the accuracy of the simulation results was verified by experiments. The results show that: under the steady state temperature field, within the temperature range required by the design parameters, the wave aberration of the optical system is less than λ/10 (λ=632.8 nm), and the accuracy of the optical axis consistency detection meets 0.02mrad; the temperature gradient field has a greater impact on the system, and it is necessary to control the temperature difference between the inside and the outside of the system to within ±3℃.
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图 1 轴对准测试系统光学系统示意图
Figure 1. Schematic diagram of the optical system of the axis alignment test system
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图 3 轴对准测试系统的光机结构
Figure 3. Optical machine structure of the axis alignment test system
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图 6 径向运动下矢高位移的计算方法
Figure 6. Calculation method of vector height displacement in radial motion
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图 7 30℃时轴对准测试系统的变形云图
Figure 7. Deformation clouds of the axis-aligned test system at 30℃
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图 8 不同温度下主次镜RMS值及PV值变化曲线
Figure 8. Variation curves of RMS and PV values of primary and secondary mirrors at different temperatures
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图 10 不同温度下各像面波像差
Figure 10. Wave aberration of each image plane at different temperatures
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图 11 不同温度下各像面光斑中心点偏移
Figure 11. Spot center shift of each image plane at different temperatures
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图 12 温度梯度下主次镜RMS值及PV值变化曲线
Figure 12. RMS and PV curves of primary and secondary mirrors under temperature gradients
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图 13 3℃温度梯度下系统成像质量分析
Figure 13. Analysis of the imaging quality of the system under a 3℃ temperature gradient
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图 14 不同温度下石英玻璃主次镜的面型精度
Figure 14. Face shape accuracy of primary and secondary mirrors of quartz glass at different temperatures
表 1 设计参数
Table 1 Design parameters
Technical specifications Numerical values Operating band/μm 0.4~14 Focal length/mm 4800 Aperture/mm 600 Secondary mirror shading ratio 0.34 Surface accuracy of primary and secondary mirrors RMS (root mean square)≤λ/20、PV (peak to valley)≤λ/3（λ＝632.8 nm） Wave aberration RMS≤λ/10（λ＝632.8 nm） Detector pixel size/μm Visible/NIR：4.8
Short-wave infrared：5
Long-wave infrared：12Operating temperature/℃ 25±5 Optical axis consistency/ mrad 0.02 
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表 2 各组件材料属性
Table 2 Material properties of each component
Materials Density/(g/cm2) Linear expansion coefficient /℃－1 Elastic modulus /GPa Poisson ratio Microcrystalline glass 2.53 5×10-8 90.3 0.24 F_SILICA 2.2 5×10-7 72.7 0.17 Al6061 2.81 2.34×10-5 70 0.33 45# Steel 7.85 1.16×10-5 210 0.31 Rubber 2.1 1.03×10-4 0.28 0.4
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表 3 光轴平行性精度测试
Table 3 Optical axis parallelism accuracy test
Modes Uniform temperature variation Temperature gradient Temperature/℃ 20 30 3 Repeatability accuracy/mrad 0.00363 0.00511 0.00905 Measurement accuracy/% 1.62 1.60 2.76
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表 4 光轴平行性检测误差
Table 4 Optical axis parallelism detection accuracy
Modes Uniform temperature variation Temperature gradient Temperature/℃ 20 30 3 Detection accuracy/mrad 0.0073 0.0082 0.011
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