Effect of Antireflection Films on Diffraction Efficiency of Diffractive Optical Element
-
摘要: 针对抗反射膜引入的附加位相，分析了衍射光学元件的衍射效率，提出了含有抗反射膜的衍射光学元件的优化设计方法。以工作在可见光波段的衍射光学元件为例，对比分析了采用传统方法和优化方法设计的衍射光学元件的衍射效率。结果表明：抗反射膜对衍射光学元件的衍射效率和带宽积分平均衍射效率的影响是不可忽略的。针对正入射和30°斜入射两种工作状态，采用优化设计方法得到的衍射光学元件的带宽积分平均衍射效率高于94%。Abstract: The diffraction efficiency of a diffractive optical element(DOE) was analyzed with an additional phase introduced by an antireflection film, and the optimum design method of a DOE with an antireflection film was proposed. For a DOE working within the visible waveband, the diffraction efficiency was compared and analyzed using the proposed optimal method and traditional method. The results showed that the influence of the antireflection film on the diffraction efficiency and the bandwidth integral average diffraction efficiency(BIADE) of the DOE is not negligible. For the two working states of normal incidence and 30° oblique incidence, the BIADE of the DOE obtained by the optimal design method was higher than 94%.
-
-
![]()
图 2 四层膜系的抗反射膜示意图
Figure 2. Schematic diagram of the antireflection film with four-layer film system
表 1 四层膜系膜层参数
Table 1 Parameters of four-layer film
Material of coating Refractive index Thickness/nm SiO2 1.46 83 Ta2O5 2.10 108 SiO2 1.46 24 Ta2O5 2.10 15 
下载: 导出CSV
表 2 衍射光学元件的带宽积分平均衍射效率
Table 2 Bandwidth integral average diffraction efficiency(BIADE) of the DOE
Incident angle 0° 30° Before optimized 20.824% 16.921% After optimized 94.749% 94.765%
下载: 导出CSV
-
[1] HUANG Zhi, BAI Jian, LU Tianxiong, et al. Stray light analysis and suppression of panoramic annular lens[J]. Opt. Express, 2013, 21(9): 10810-10820. DOI: 10.1364/OE.21.010810
[2] 孙林, 崔庆丰. 成像光学系统杂光系数分析与计算[J]. 激光与光电子学进展, 2018, 55(12): 122901. https://www.cnki.com.cn/Article/CJFDTOTAL-JGDJ201812059.htm SUN Lin, CUI Qingfeng. Analysis and calculation of veiling glare index of optical imaging systems[J]. Laser & Optoelectronics Progress, 2018, 55(12): 122901. https://www.cnki.com.cn/Article/CJFDTOTAL-JGDJ201812059.htm
[3] HUANG Chan, ZHANG Miaomiao, CHANG Yuyang, et al. Directional polarimetric camera stray light analysis and correction[J]. Appl. Opt., 2019, 58(26): 7042-7049. DOI: 10.1364/AO.58.007042
[4] 沃伦J. 史密斯. 现代光学工程[M]. 4版: 北京: 化学工业出版社, 2011. Warren J Smith. Modern Optical Engineering[M]. Fourth Edition: Beijing: Chemical Industry Press, 2011.
[5] 马新尖, 司志华, 杨东, 等. 三层氮化硅减反射膜在单晶硅太阳电池中的应用[J]. 激光与光电子学进展, 2018, 55(6): 061602. https://www.cnki.com.cn/Article/CJFDTOTAL-JGDJ201806044.htm MA Xinjian, SI Zhihua, YANG Dong, et al. Application of three-layer silicon nitride antireflection coatings in mono-crystalline silicon solar cells[J]. Laser & Optoelectronics Progress, 2018, 55(6): 061602. https://www.cnki.com.cn/Article/CJFDTOTAL-JGDJ201806044.htm
[6] 王伦, 薛常喜, 兰喜瑞, 等. 紫外光固化有机-无机纳米复合材料成型衍射光学元件制造技术[J]. 光学学报, 2019, 39(7): 0722001. WANG Lun, XUE Changxi, LAN Xirui, et al. Manufacturing technology of diffractive optical elements formed by ultraviolet-cured organic -inorganic nanocomposites[J]. Acta Optica Sinica, 2019, 39(7): 0722001.
[7] 杨亮亮, 赵勇兵, 唐健, 等. 温度与微结构高度误差对衍射光学元件衍射效率的影响研究[J]. 红外技术, 2020, 42(3): 213-217. http://hwjs.nvir.cn/article/id/hwjs202003002 YANG Liangliang, ZHAO Yongbing, TANG Jian, et al. Research on the influence of temperature and microstructure height error on diffraction efficiency for diffractive optical elements[J]. Infrared Technology, 2020, 42(3): 213-217. http://hwjs.nvir.cn/article/id/hwjs202003002
[8] Dobrowolski J A, Brian T Sullivan. Universal antireflection coatings for substrates for the visible spectral region[J]. Appl. Opt., 1996, 35(25): 4993-4997. DOI: 10.1364/AO.35.004993
[9] 于天燕, 朱福荣, 刘定权, 等. 硫化锌透镜中长波红外宽带增透膜的研制[J]. 光学学报, 2005, 25(2): 270-273. DOI: 10.3321/j.issn:0253-2239.2005.02.028 YU Tianyan, ZHU Furong, LIU Dingquan, et al. Design and deposition of broadband IR antireflection coatings on ZnS lenses[J]. Acta Optica Sinica, 2005, 25(2): 270-273. DOI: 10.3321/j.issn:0253-2239.2005.02.028
[10] Gaĭnutdinov I S, Shuvalov N Yu, Sabirov R S, et al. Antireflection coatings on germanium and silicon substrates in the 3–5-μm and 8–12-μm windows of IR transparency[J]. J. Opt. Technol., 2009, 76(5): 302-305. DOI: 10.1364/JOT.76.000302
[11] Zarei Moghadam R, Ahmadvand H, Jannesari M. Design and fabrication of multi-layers infrared antireflection coating consisting of ZnS and Ge on ZnS substrate[J]. Infrared Physics & Technology, 2016, 75: 18-21. http://www.onacademic.com/detail/journal_1000038957200910_2ccb.html
[12] 程海娟, 于晓辉, 彭浪, 等. Ge基底LaF3-ZnS-Ge高耐用中波红外增透膜[J]. 红外与激光工程, 2019, 48(11): 1117001. https://www.cnki.com.cn/Article/CJFDTOTAL-HWYJ201911036.htm CHENG Haijuan, YU Xiaohui, PENG Lang, et al. LaF3-ZnS-Ge high-durability MWIR antireflective film on Ge substrate[J]. Infrared and Laser Engineering, 2019, 48(11): 1117001. https://www.cnki.com.cn/Article/CJFDTOTAL-HWYJ201911036.htm
[13] 毛珊, 赵建林. 镀有增透膜的多层衍射光学元件的优化设计方法[J]. 光学学报, 2019, 39(3): 0305001. https://www.cnki.com.cn/Article/CJFDTOTAL-GXXB201903008.htm MAO Shan, ZHAO Jianlin. Optimal design for multi-layer diffractive optical elements with antireflection films[J]. Acta Optica Sinica, 2019, 39(3): 0305001. https://www.cnki.com.cn/Article/CJFDTOTAL-GXXB201903008.htm
计量
- 文章访问数:
- HTML全文浏览量:
- PDF下载量:
