Quality Control of the PZT Wafer Bonding in Pyroelectric Infrared Detector
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引用本文: | 黄江平, 冯江敏, 王羽, 苏玉辉, 信思树, 李玉英. 热释电红外探测器PZT晶片粘接质量控制[J]. 红外技术, 2013, (12): 764-767. |
Citation: | HUANG Jiang-ping, FENG Jiang-min, WANG Yu, SU Yu-hui, XIN Si-shu, LI Yu-ying. Quality Control of the PZT Wafer Bonding in Pyroelectric Infrared Detector[J]. Infrared Technology , 2013, (12): 764-767. |