光学窗口真空钎焊技术研究现状

Current Status of Vacuum Brazing Technology for Optical Windows

  • 摘要: 光学窗口作为半导体光电器件封装中的关键外壳构件之一,为光电器件提供了必不可少的光学信号透过路径,该结构的封接质量会对器件的长期寿命产生重要影响。真空钎焊技术是以钎料作为填充材料,并在真空环境下将窗座与光窗片钎焊获得永久气密性连接的过程,是实现光学窗口封接的主要技术之一,其具有封接温度低、气密性高、平面度好以及可靠性高等优点,被广泛应用于光学器件真空气密性封装及光学设备制造等领域。文中从钎料类型、金属化结构设计、钎焊设备、焊接空洞率、气密性以及力学性能测试等方面对光学窗口真空钎焊技术的研究现状进行了介绍,并指出在此领域内未来技术的发展趋势。

     

    Abstract: As a key shell component of semiconductor optoelectronic device packages, optical windows provide an indispensable optical signal transmission channel for optoelectronic devices, and the sealing quality of the structure has a significant impact on the long-term life of the device. Vacuum brazing technology is the process of obtaining a hermetic optical window by welding a metal shell and metalized optical window with solder under a vacuum environment and is one of the main technologies used to seal optical windows. It has the advantages of low sealing temperature, high air-tightness, good flatness, and long-term reliability, and it is widely used in the fields of optical device vacuum hermetic packaging and optical equipment manufacturing. In this study, the research status of vacuum brazing technology for optical windows is introduced from the perspectives of filler metal type, metallization structure design, brazing equipment, welding void ratio, gas tightness, and mechanical properties, and the development trends of future technologies in this field are discussed.

     

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