Effect of Organic Membrane on the Performance of Ion Barrier Microchannel Plate
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摘要:
有机载膜作为Al2O3防离子反馈膜制备的临时衬底，其膜层厚度及致密度显著影响防离子反馈微通道板（MCP）的电子透过性及电特性。本文利用台阶仪及金相显微镜研究了有机载膜厚度对其膜层致密度的影响，并结合微通道板综合性能测试台分析膜层厚度对防离子反馈MCP电子透过性及电特性的影响。研究结果证明有机载膜膜层致密度随其厚度的增加而提高；有机载膜厚度低至17 nm时，其膜层致密度低，电子可直接从有机载膜内的微孔穿过，使得带有机载膜及Al2O3薄膜的微通道板具备一定的电子透过性；有机载膜厚度增加至136 nm，膜层致密度显著提升，带有机载膜及Al2O3薄膜的微通道板几乎可阻挡所有入射电子，这也是仅带Al2O3膜的防离子反馈MCP的阈值电压及电子增益损失量随有机载膜厚增加的重要原因；有机载膜厚度处于56~101 nm之间可满足高增益、高致密性防离子反馈MCP的性能最佳需求。
Abstract:Organic membranes are used as temporary substrates for the preparation of Al2O3 ion barrier films, and their thickness and compactness significantly affect the electron transmittance and electrical characteristics of the ion barrier microchannel plate (MCP). The micromorphologies of organic membranes with different thicknesses were analyzed using a step tester and metallographic microscope, and the electron transmittance and electrical characteristics of the ion barrier MCP were tested using comprehensive performance test equipment. The results show that the compactness of the organic membrane increases with increasing organic membrane thickness. When the thickness of the organic membrane is as low as 17 nm, the electrons can directly penetrate through the micropores in the organic membrane, which has low compactness; therefore, the MCP with the organic membrane and Al2O3 film shows good electron permeability. As the thickness of the organic membrane increases to 136 nm with high compactness, the MCP with the organic membrane and Al2O3 film can block almost all incident electrons. This explains why the threshold voltage and loss of current gain of the ion barrier MCP with Al2O3 film increase as the thickness of the organic membrane increases. The optimal thickness of the organic membrane is approximately 56–101 nm, as it satisfies the high-current gain and high-compactness ion barrier requirements of MCPs.
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图 1 微通道板综合性能测试台原理示意图
Figure 1. Comprehensive performance test equipment of the microchannel plate
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图 2 不同厚度的有机载膜：(a)17 nm；(b) 56 nm；(c) 101 nm；(d) 136 nm
Figure 2. Organic membrane with different thickness: (a)17 nm; (b) 56 nm; (c) 101 nm; (d) 136 nm
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图 3 不同厚度下有机载膜的微观形貌：(a) 17 nm；(b) 56 nm；(c) 101 nm；(d) 136 nm
Figure 3. Micromorphology of organic membrane with different thickness: (a) 17 nm; (b) 56 nm; (c) 101 nm; (d) 136 nm
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图 4 Al2O3防离子反馈MCP（MCP@Al2O3）的电子透过特性曲线
Figure 4. Electron transmittance characteristic curves for MCP@Al2O3
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图 5 带有机载膜的MCP（MCP@OM@ Al2O3）电子透过特性曲线
Figure 5. Electron transmittance characteristic curves for MCP@OM@ Al2O3
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图 6 不同有机载膜厚度下MCP、MCP@OM@ Al2O3、MCP@ Al2O3的电子增益
Figure 6. Current gain of MCP, MCP@OM@ Al2O3, MCP@ Al2O3 with different thickness
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