基于红外激光干涉仪的非球面面形测试技术研究

李彦生; 唐莹娟; 李汝劼; 许红; 苏斌; 何雨纯; 程敬辉; 陈奕君; 王乔方

基于红外激光干涉仪的非球面面形测试技术研究

1.
昆明北方红外技术股份有限公司, 云南昆明 650217
2.
昆明物理研究所, 云南昆明 650223
3.
云南开放大学光电与通信工程学院, 云南昆明 650223
4.
陆军装备部驻重庆地区军事代表局驻昆明地区第二军事代表室, 云南昆明 650032

详细信息

作者简介:
李彦生（1979-）男，硕士，高级工程师，主要从事光电技术研究。E-mail：29709870@qq.com

中图分类号: TN219
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- 被引次数: 0
出版历程
- 收稿日期: 2022-07-05
- 修回日期: 2022-09-21
- 刊出日期: 2022-11-20

Aspheric Surface Measurement Based on Infrared Laser Interferometer

1.
Kunming North Infrared Technology Co. Ltd, Kunming 650217, China
2.
Kunming Institute of Physics, Kunming 650223, China
3.
College of Optoelectronic Engineering, Yunnan Open University, Kunming 650223, China
4.
The second military representative office in Kunming of the armament department in Chongqing, Kunming 650032, China

摘要

摘要: 本文提出了一种基于红外激光干涉仪检测非球面面形的新方法，分为3个步骤：首先，利用红外激光干涉仪测量分析出非球面与标准球面之间的波像差；然后，根据非球面方程得出非球面与标准球面之间波像差的理论值；最后通过计算得出非球面的面形偏差。为验证这一方法的正确性和可靠性，采用ZYGO可见光干涉仪，使用补偿镜法测量了同一块抛物面反射镜的面形误差。结果表明，两种测量方法结果吻合。本新方法方便快捷，具有较强的通用性，可以用于非球面在加工过程中的面形测试。
- 红外激光干涉仪 /
- 非球面面形 /
- 波像差
Abstract: Here, a novel method for measuring an aspheric surface using an infrared laser interferometer is proposed. The model is divided into three modules. First, the wave front aberration between the aspheric surface and the standard spherical surface was measured by an infrared laser interferometer. Then, the theoretical value of the wave image difference between the aspheric surface and the standard spherical surface was calculated according to the aspheric equation. Finally, the surface shape deviation of the aspheric surface was calculated. To verify the validity and reliability of this method, the surface shape error of the same paraboloidal mirror was measured using the ZYGO visible light interferometer and the compensation mirror method. The obtained results indicate that these two measurement methods were identical. Hence, the novel method is convenient, fast, and highly versatile and can be used to test aspheric surfaces during processing.
- infrared laser interferometer /
- aspheric surface /
- wave front aberration

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图 1 红外激光干涉仪测量非球面示意图

Figure 1. Schematic diagram of measuring aspheric surface by an infrared laser interferometer

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图 2 干涉仪测量非球面面形流程

Figure 2. Flow chart of measuring aspheric surface by the interferometer

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图 3 非球面与最接近球面

Figure 3. Aspheric surface and closest spheric surface

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图 4 红外激光干涉仪的测试结果

Figure 4. The measured results of infrared laser interferometer

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图 5 非球面度关于R和a的分布

Figure 5. Asphericity about the distribution of both R and a

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图 6 非球面最接近球面的偏差曲线图

Figure 6. Deviation curve of aspheric surface closest to spherical surface

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图 7 非球面最接近球面面形偏差的Zernike系数拟合结果

Figure 7. Fitting results of the Zernike coefficients for the deviation of aspheric surface closest to spherical surface

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图 8 非球面面形偏差检测结果

Figure 8. The measured results of the aspheric surface deviation

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图 9 干涉仪补偿法非球面面形测试结果

Figure 9. The measured results of aspheric surface by interferometer compensation method

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图 10 非球面面形偏差测试结果图

Figure 10. The measured results of the aspheric surface deviation

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表 1 两种方法检测的面形误差及相对误差

Table 1. The surface errors and relative errors detected by the two methods

Compensation method Interference method Relative error

PV/μm 0.519 0.543 4.5%

RMS/μm 0.169 0.176 4%

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参考文献(8)

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