芯片级节流制冷器流动特性数值计算及制冷性能实验研究

Numerical and Experimental Study of Flow Characteristics and Cooling Performance of Micro Miniature Refrigerators

  • 摘要: 芯片级节流制冷器(简称MMR)是一种采用微加工工艺制成的新型节流制冷器,其轴向尺寸大幅短于传统节流制冷器,能够显著降低与之适配的红外探测器体积。为研究MMR的工作特性,建立了适用于高压力工况下气体物性沿流动方向显著变化的微槽道流动计算模型,该模型与实验验证结果符合良好。进一步在流动模型的基础上增加了微槽道换热、制冷器槽道分布和外形尺寸计算。根据计算模型制造了MMR样机并对其进行了实验研究,样机流量实验数据与计算模型符合良好。该样机在10 MPa的氮气和氩气工况下分别达到了110 K、119 K的制冷温度,制冷量分别为231 mW、479 mW,降温时间分别为250 s、70 s优于国外MMR性能,并且能够满足红外探测器对于节流制冷器的制冷性能需求。

     

    Abstract: The micro miniature refrigerator (MMR) is a novel Joule-Thomson cryocooler manufactured using micromachining technology, and its axial length is significantly shorter than that of traditional Joule-Thomson cryocoolers used in infrared detectors. MMRs can significantly reduce the size of infrared detectors when they are successfully integrated. To study the working mechanism of MMRs, a microchannel flow calculation model is established considering the high working pressure and significant change in the gas properties along the microchannels, and the calculation model is verified experimentally. The heat transfer characteristics, microchannel distribution, and overall dimensions of the MMRs are further investigated. Furthermore, an MMR prototype is fabricated based on the calculation results and its cooling performance is studied experimentally. The experimental results correspond well to the predictions of the calculation model. The MMR prototype achieved cooling temperatures of 110 K and 119 K under 10 MPa N2 and Ar working conditions, the cooling power reaches 231 mW and 479 mW, and the cool-down times are 250 s and 70 s, respectively. Consequently, the cooling performance of the MMR prototype is superior to that of the foreign MMR and meets the cooling requirements of infrared detectors.

     

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