一种基于图像处理的红外微扫描器件测量与校准的方法

An Infrared Micro Scanner Measurement and Calibration Method Based on Image Processing

摘要: 在以红外焦平面为核心的红外成像系统中，微扫描器件可以有效提高整个系统的空间分辨率。针对微扫描器件的检测，本文提出了一种基于图像处理的测量与校准方法，并搭建了一套检测系统用于对微扫描器件进行检测与校准。以某型微扫描器件为测试对象，实验结果表明本文所提方法在测量精度、重复精度以及不确定度方面均达到了良好的效果，可以为微扫描器件的设计、生产提供基础支撑。

Abstract: In infrared imaging systems, in which the core is an infrared focal plane array, a microscanner can enhance the spatial resolution of the entire system. To test microscanners, this study developed a measurement and calibration method based on image processing and built a system to measure and calibrate microscanners. Using a microscanner as a test subject, the test results indicate that the proposed method has a significant effect on the measurement accuracy, repetition accuracy, and uncertainty. The method can provide technical support for the design and manufacture of microscanners.