二类超晶格红外焦平面探测器的研究进展

The Research Progress in Type Ⅱ Superlattices Infrared Focal Plane Array Detectors

摘要: 近几年，二类超晶格红外探测器在材料生长、器件结构设计、器件制备上经历了快速的发展，使得二类超晶格成为除碲镉汞外最受关注的红外探测器材料。本文简要介绍了二类超晶格的优势，总结了国际上二类超晶格红外探测器研究进展，回顾了二类超晶格红外探测器的技术发展历程，并分析了国内二类超晶格材料与器件中存在的技术问题。

Abstract: In recent years, the type Ⅱ superlattices (T2SL) infrared detector has experienced incredible improvements in material growth, device structure design, device fabrication techniques, which make the T2SL become the most popular infrared detector material, besides HgCdTe. This article briefly introduces the advantage of the T2SL material, summarizes the international research status in T2SL-based photodetectors, reviews the history of technology development of T2SL-based photodetectors and analyzes the drawback of the research of T2SL material and device technology in China.