高亮绿光氮化镓基Micro-LED微型显示器制备

Fabrication of GaN-based Micro-LED Green Micro-display with High Brightness

  • 摘要: Micro-LED作为一种新型的显示技术,具有对比度高、响应快及寿命长等优点,已成为当前研究的热点。然而,尽管潜力巨大,Micro-LED技术的商业化之路仍面临诸多技术上的挑战与瓶颈。本文旨在探讨高亮绿光氮化镓基Micro-LED微型显示器的制备过程及其相关技术。基于WVGA041全数字信号电路CMOS硅基驱动电路,制作了0.41 inch、分辨率为800×480的主动式单色绿光Micro-LED微型显示器。利用高精度倒装焊接技术实现了CMOS驱动电路与LED发光芯片的电气连接。结果表明,制备出LED显示芯片正常启亮电压为2.8 V,EL光谱峰值波长524 nm;在硅基CMOS电路驱动范围内,Micro-LED微型显示器在5 V电压下,器件亮度为108000 cd/m2(最大亮度可达250000 cd/m2),电流密度达到0.61 A/cm2时色坐标为(0.175, 0.756)。当电流密度从0.3 A/cm2增加到1.3 A/cm2时,色坐标从(0.178, 0.757)变化到(0.175,0.746),器件的色稳定性能够满足实际应用要求。

     

    Abstract: Micro-LEDs are a new display technology with advantages including high contrast, fast response, and long lifetimes. Micro-LEDs are currently regarded as an active topic of research. Micro-LED display technology is a promising industry, but its commercialization faces many technical challenges and bottlenecks. This study explores the diode preparation process and related technologies for high-brightness, green-light, GaN-based micro-LED micro-displays. Monochrome green micro-LEDs with resolutions of 800×480 and 0.41 in were fabricated based on the CMOS driver circuit of an all-digital signal circuit. The CMOS driver circuit was connected to an LED chip via high-precision flip bonding. The experimental results showed that the turn-on voltage of the LED was 2.8 V and that the peak wavelength of the electroluminescence spectrum was 524 nm. The maximum brightness of the device can reach 250, 000 cd/m2 within the normal driving range of silicon-based CMOS circuits, and the brightness can reach 108, 000 cd/m2 at 5 V. When the current density was controlled at 0.61 A/cm2, the CIE coordinates were (0.175, 0.756). When the current density was increased from 0.3 A/cm2 to 1.3 A/cm2, the CIE coordinates changed from (0.178, 0.757) to (0.175, 0.746). The color stability of the device met the requirements for practical applications.

     

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