Abstract:
The Kunming Institute of Physics has achieved significant advancements in the directional growth technology of
ϕ150 mm cadmium zinc telluride (CZT) single crystals, thus enabling the small-scale production of 100 mm× 100 mm CZT substrates. The dislocation etch pit density (EPD) is ≤4×10
4cm
-2, with precipitate dimensions of < 5 μm and a density of < 5×10
3cm
-2. In addition, 100 mm×100 mm large-area mercury cadium telluride (MCT) thin films were successfully prepared via the surface treatment of large-sized CZT substrates and tellurium-rich horizontal sliding-boat liquid-phase epitaxy. These films exhibit excellent surface quality, with thickness variation within ±1.25μm and compositional variation better than ±0.0031. This achievement represents the largest area of CZT-based MCT thin films reported internationally and therefore provides a solid foundation for the development of 10 k× 10k or larger-scale infrared detectors and the mass production of 4 k× 4k scale infrared detector products.
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