Optical Optimization and Simulation of Micro-bolometers Based on α-Si:H Thin Film
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引用本文: | 何敏, 李伟, 李雨励, 孙言, 蒋亚东. 基于非晶硅薄膜的微测辐射热计光学仿真和优化[J]. 红外技术, 2012, 34(6): 319-324,331. DOI: 10.3969/j.issn.1001-8891.2012.06.003 |
Citation: | HE Min, LI Wei, LI Yu-li, SUN Yan, JIANG Ya-dong. Optical Optimization and Simulation of Micro-bolometers Based on α-Si:H Thin Film[J]. Infrared Technology , 2012, 34(6): 319-324,331. DOI: 10.3969/j.issn.1001-8891.2012.06.003 |