InAsSb XBn器件电容-电压特性研究

Research on Capacitance-Voltage Characteristics of InAsSb Barrier Infrared Detectors

  • 摘要: 为阐明InAsSb势垒型红外探测器的电容响应机制,本文构建了InAsSb XBn器件电容-电压(C-V)特性的数值仿真模型,系统研究了势垒层掺杂类型/浓度/厚度、吸收层及电极接触层掺杂浓度对器件C-V特性的影响,揭示了nBn和pBn器件电容分别受限于势垒层介电响应与界面耗尽演化的不同规律。制备了InAs0.91Sb0.09基nBn及pBn单元器件,在变温条件下(77~290 K)开展C-V测试,重点提取150 K工作温度下各功能层有效载流子浓度。结果显示:nBn器件吸收层有效载流子浓度由100 K时的1.0×1016 cm-3增至150 K时的1.35×1016 cm-3,势垒层为2.6×1015 cm-3;pBn器件在150 K下吸收层与势垒层分别为3.3×1015 cm-3与3.2×1016 cm-3。本研究为InAsSb势垒器件的掺杂定量表征与结构优化提供了理论依据。

     

    Abstract: We developed a numerical capacitance-voltage (C-V) model for InAsSb XBn devices using the Sentaurus TCAD simulation platform to elucidate the capacitance response mechanism of InAsSb barrier infrared detectors. The effects of barrier layer doping type/concentration/thickness, absorber doping, and contact doping on the C-V characteristics are systematically investigated, revealing distinct capacitance-limiting mechanisms: nBn devices are governed by barrier dielectric response, whereas pBn devices are controlled by interface depletion evolution. nBn and pBn single-element photodetectors based on InAs0.91Sb0.09 were fabricated and characterized via C-V measurements over a temperature range of 77-290 K, with particular emphasis on extracting the effective carrier concentrations of each functional layer at 150 K. The results show that the effective carrier concentration of the nBn absorber layer increases from 1.0×1016 cm-3 at 100 K to 1.35×1016 cm-3 at 150 K, with the barrier layer exhibiting a doping concentration of 2.6×1015 cm-3 for the pBn device at 150 K, the absorber and barrier layer doping concentrations are determined to be 3.3×1015 cm-3 and 3.2×1016 cm-3, respectively. This study provides a theoretical foundation for quantitative doping characterization and structural optimization of InAsSb barrier infrared detectors.

     

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