电荷层对基于异质SACM结构的InSb-APD红外探测器性能的影响

Effect of Charge Layer on the Performance of InSb-APD Infrared Detector Based on Heterogeneous SACM Structure

  • 摘要: 基于InSb的雪崩光电二极管因其高灵敏度、稳定性和低成本等特点,广泛应用于红外探测。然而,InSb在室温下的窄带隙引入了显著的噪声机制,影响了器件的性能。为了解决上述问题,本文在SAM(separate absorption and multiplication)型结构的基础上引入电荷层,提出了一种异质性选择性雪崩电荷调制结构SACM(separate absorption charge multiplication),并使用Silvaco ATLAS仿真平台,构建了二维背照式倍增SACM型探测器模型,研究了掺杂浓度、厚度及其对器件性能的影响。研究结果表明,电荷层的掺杂浓度为5×1016 cm⁻3,厚度为0.1 μm时,能够最大化雪崩增益并最小化暗电流。相比于SAM结构,SACM结构的光电流最大值增大,其响应度最大值3.06 A/W出现在5.6 μm波长处,为SAM结构的1.4倍,峰值处的外量子效率增长了20%,达到67.6%。归一化探测率在SAM结构的基础上增大了65.5%。

     

    Abstract: Indium antimonide (InSb)-based avalanche photodiodes(APD) are widely used in infrared detection because of their high sensitivity, stability, and low cost. However, the narrow bandgap of InSb at room temperature introduces significant noise mechanisms, which degrade the device performance. To address these issues, based on the conventional separate absorption and multiplication (SAM) structure, a charge layer was introduced, and a novel heterostructure-selective avalanche charge modulation structure, termed separate absorption charge and multiplication(SACM), was proposed. A two-dimensional back-illuminated multiplication SACM-type photodetector model was constructed using the Silvaco ATLAS simulation platform. The effects of doping concentration and layer thickness on device performance were systematically investigated. The results show that with a charge layer doping concentration of 5 × 1016 cm-3 and thickness of 0.1 μm, the avalanche gain is maximized and the dark current is minimized. Compared with the SAM structure, the SACM structure exhibited a higher maximum photocurrent. Its maximum responsivity reached 3.06 A/W at a wavelength of 5.6 μm, which is 1.4 times that of the SAM structure. The external quantum efficiency at the peak wavelength increased by 20%, reaching 67.6%. Moreover, the normalized detectivity is improved by 65.5% compared with that of the SAM structure.

     

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