碲镉汞红外焦平面器件无效像元研究

Invalid Pixels of HgCdTe Infrared Focal Plane Devices

  • 摘要: 由于材料和芯片工艺缺陷等原因,碲镉汞红外焦平面器件中不可避免地存在无效像元,影响红外成像系统的图像质量和目标识别。本文将无效像元分为盲元和闪元,通过对盲元和闪元进行分析,探究了盲元和闪元的成因,并提出了相应的控制措施。无效像元的产生受碲镉汞薄膜材料的缺陷密度和芯片工艺过程中引入的工艺缺陷影响,通过改善衬底和薄膜材料外延层质量能有效控制材料缺陷密度、通过器件工艺优化和工艺控制能有效控制工艺过程中引入的缺陷,从而减少无效像元的产生。

     

    Abstract: Owing to inherent material properties and chip fabrication processes, invalid pixels are inevitably present in infrared focal-plane arrays (IRFPAs), which degrade image quality and compromise target recognition in infrared imaging systems. Invalid pixels are classified into bad pixels and blinking pixels. Based on analysis of these two types, their underlying causes are investigated, and corresponding mitigation measures are proposed. The formation of invalid pixels is influenced by the defect density in mercury cadmium telluride (HgCdTe) epitaxial films and by process-induced defects during device fabrication. By enhancing the quality of both the substrate and the epitaxial layers, the material defect density can be significantly reduced, thereby lowering the count of invalid pixels. Meanwhile, process-induced defects can be effectively suppressed through optimized device processing and rigorous process control, further minimizing the occurrence of invalid pixels.

     

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