XU Shu-li, ZHANG Guo-dong. Study on Technology of InSb Etched by Inductive Couple Plasmas Dry Etching[J]. Infrared Technology , 2012, 34(3): 151-154. DOI: 10.3969/j.issn.1001-8891.2012.03.005
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Citation:
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XU Shu-li, ZHANG Guo-dong. Study on Technology of InSb Etched by Inductive Couple Plasmas Dry Etching[J]. Infrared Technology , 2012, 34(3): 151-154. DOI: 10.3969/j.issn.1001-8891.2012.03.005
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XU Shu-li, ZHANG Guo-dong. Study on Technology of InSb Etched by Inductive Couple Plasmas Dry Etching[J]. Infrared Technology , 2012, 34(3): 151-154. DOI: 10.3969/j.issn.1001-8891.2012.03.005
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Citation:
|
XU Shu-li, ZHANG Guo-dong. Study on Technology of InSb Etched by Inductive Couple Plasmas Dry Etching[J]. Infrared Technology , 2012, 34(3): 151-154. DOI: 10.3969/j.issn.1001-8891.2012.03.005
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