氧化钒非制冷探测器吸收特性研究

杨君; 杨春丽; 袁俊; 尹树东; 李华英; 白兰艳; 马敏

氧化钒非制冷探测器吸收特性研究

昆明物理研究所, 云南昆明 650223

详细信息

作者简介:
杨君（1997-），男，硕士研究生，研究方向是非制冷探测器超表面结构技术研究。E-mail: yangjun_wulisuo@163.com

通讯作者:
杨春丽（1980-），女，正高级工程师，主要从事红外探测器研究。E-mail：149578363@qq.com

中图分类号: TN215
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- 文章访问数: 60
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- 被引次数: 0
出版历程
- 收稿日期: 2023-07-13
- 修回日期: 2023-11-22
- 刊出日期: 2024-03-20

Study on Absorption Characteristics of VO_x Uncooled Detectors

Kunming Institute of Physics, Kunming 650223, China

摘要

摘要: 随着氧化钒非制冷红外焦平面的像元尺寸的减小，导致探测器的吸收面积呈边长的二次方锐减，如何提高氧化钒非制冷红外焦平面阵列的吸收效率成为一个非常关键的研究课题。本文从材料和结构角度出发，分别在单层材料吸收特性、不同吸收结构、腔体高度、膜系厚度等几个方面对影响单层、双层氧化钒非制冷探测器光学吸收的各因素进行了全面系统的仿真。通过对各因素进行量化比较，同时结合仿真结果给出了提高氧化钒非制冷探测器吸收的系统方法，对于氧化钒非制冷探测器的设计与研究具有一定的参考意义。
- 氧化钒非制冷探测器 /
- 吸收特性 /
- 光学仿真 /
- 膜厚分析 /
- 腔体优化
Abstract: As the pixel size of the vanadium oxide (VO_x) uncooled infrared focal plane decreased, the absorption area of the detector exhibited a sharp quadratic decrease in the edge length. Improving the absorption efficiency of the VO_x uncooled infrared focal plane arrays has become a crucial research topic. In this study, a comprehensive and systematic simulation of the factors affecting the optical absorption of single-layer and double-layer VO_x uncooled detectors was conducted from the aspects of material and structure, in terms of the absorption characteristics of single-layer material, different absorption structures, height of the cavity, and thickness of the film system. A systematic approach to improve the absorption of VO_x uncooled detectors is provided by quantitatively comparing the factors with the simulation results, which have certain reference significance for the design and research of VO_x uncooled detectors.
- VO_x uncooled detectors /
- absorption characteristics /
- optical simulation /
- film thickness analysis /
- cavity optimization

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图 1 各材料光学参数及光学性质（图(b)、(c)中A、T、R分别表示吸收率(Absorptivity)、透射率(Transmissivity)、反射率(Reflectivity)，图(c)与图(b)共用一个图例）

Figure 1. Optical parameters and optical properties of each material (A, T, and R in Figures (b) and (c) represent Absorptivity, Transmissivity, and Reflectivity, respectively. Figures (c) and (b) share the same legend)

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图 2 氧化钒非制冷探测器示意图

Figure 2. Schematic of an VO_x uncooled detector

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图 3 氧化钒非制冷探测器桥腿类型

Figure 3. VO_x uncooled detector bridge leg types

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图 4 氧化钒非制冷探测器不同吸收结构示意图（其中表面结构为SiN_x/Ti/SiN_x夹层柱状超表面天线结构，SiN_x/Ti/SiN_x夹层厚度分别为50 nm/10 nm/50 nm；天线周期为2.5 μm，柱状天线直径为1.5 μm；其他结构各膜系参数同图 2所示）

Figure 4. Schematic diagram of different absorption structures of VOx uncooled detectors(The surface structure is a SiN_x/Ti/SiN_x sandwich columnar metasurface antenna structure, with a thickness of 50nm/10nm/50nm for SiN_x/Ti/SiN_x interlayers; the antenna period is 2.5 μm, and the diameter of the columnar antenna is 1.5 μm; the parameters of other structures and film systems are shown in Figure 2)

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图 5 氧化钒非制冷探测器不同吸收结构吸收情况（图(a)~(h)共用图(a)的图例，其中R、A、T分别表示反射率(Reflectivity)、吸收率(Absorptivity)、透射率(Transmissivity)）

Figure 5. Absorption of different absorption structures of VO_x uncooled detectors (Figures (a) to (h) share the legend of Figure (a), where R, A, and T respectively represent Reflectivity, Absorptivity, and Transmittance)

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图 6 双层氧化钒非制冷探测器结构示意图

Figure 6. Schematic diagram of the structure of the double-layer VO_x uncooled detector

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图 7 不同腔体吸收曲线（上层腔体固定时，吸收随下层腔体变化的曲线）

Figure 7. Absorption curves of different cavities (curves of absorption with lower chamber when the upper cavity is fixed)

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图 8 氧化钒非制冷探测器双层结构各层膜系不同厚度下吸收曲线

Figure 8. Absorption curves of different thicknesses of each layer film system in the double layer structure of VO_x uncooled detectors

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图 9 基于上述仿真结果的氧化钒非制冷探测器不同吸收结构吸收情况对比图（其中图例表示如下: a—无吸收结构；b—有反射层；c—有谐振腔；d—有表面结构；e—有腔有反射层；f—有腔有表面结构；g—有反射层有表面结构；h—有表面结构有腔有反射层；i—双层结构）

Figure 9. Comparison diagram of different absorption structures of VO_x uncooled detectors based on the above simulation results (the legend is shown below: a—without absorption structure; b—with reflective layer; c—with resonant cavity; d—with surface structure; e—with cavity and reflective layer; f—with cavity and surface structure; g—with reflective layer and surface structure; h—with surface structure, cavity, and reflective layer; i—Two-layer structure)

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表 1 氧化钒非制冷探测器不同吸收结构吸收情况对比

Table 1. Comparison of absorption structures of VO_x uncooled detectors

Serial number	Fill factor	Resonator	Reflective layer	Surface structure	8-14 μm Effective average absorption
1	50%	without	without	without	16%
2	70%	without	without	without	22%
3	70%	with	without	without	30%
4	70%	without	with	without	11%
5	70%	without	without	with	29%
6	70%	with	with	without	44%
7	70%	with	without	with	36%
8	70%	without	with	with	32%
9	70%	with	with	with	49%

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