Micro-coolers Based on MEMS Technology
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摘要: 微机电系统MEMS（micro-electro-mechanical system）是一种集合了微电子与机械工程技术的新型高科技装置，其制造工艺可以进行最小至纳米尺度的加工以及高度集成化的微型制造。其产品微小体积、高度集成化以及高性能高产热的特性也决定了其需要匹配相应的制冷解决方案，本文重点阐述了基于MEMS制造工艺并同时应用于MEMS产品的微型制冷器的工作原理、性能及发展趋势。分别分析了微型半导体制冷器以及微型节流制冷器各自的优势和不足，对微型制冷器的未来发展提出了建议。Abstract: Micro-electro-mechanical systems (MEMS) are a new type of high-tech devices that combine microelectronics and mechanical engineering technology. Their manufacturing process can be highly integrated and conducted at the minimum nanometer scale. MEMS products also require corresponding refrigeration solutions because of their small volume, high integration, high performance, and high heat production. This study focuses on micro-semiconductors and Joule-Thomson (JT) coolers fabricated via MEMS technology that can also be applied to MEMS products. The working principles, performance, and development trends of the micro-coolers are discussed, and the advantages and disadvantages of micro-semiconductors and JT coolers are analyzed, respectively. Additionally, certain suggestions regarding the future development of micro-coolers are provided
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Key words:
- MEMS /
- micro manufacturing /
- micro coolers
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图 2 悬空结构微型半导体制冷器示意图
Figure 2. Schematic diagram of suspended micro semiconductor cooler
图 4 适配中红外激光系统的二级微型半导体制冷器
Figure 4. Two stage micro semiconductor cooler for a mid-IR laser system
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[1] 薛淞元. 微机电系统科学与技术发展趋势[J]. 数字技术与应用, 2018, 36(11): 212-213. https://www.cnki.com.cn/Article/CJFDTOTAL-SZJT201811116.htm [2] Esashi M, Ono T. Micro-nano electromechanical system by bulk silicon micromachining[J]. Optics and Precision Engineering, 2002, 10(6): 608-613. http://www.cnki.com.cn/Article/CJFDTotal-GXJM200206015.htm [3] 刘少波. 新型MEMS致冷器研究[J]. 电子工业专用设备, 2004, 108: 21-25. doi: 10.3969/j.issn.1004-4507.2004.01.006 [4] 吴雷, 高明, 张涛, 等. 热电制冷的应用与优化综述[J]. 制冷学报, 2018, 11(8): 1-16. https://www.cnki.com.cn/Article/CJFDTOTAL-ZLXB201906001.htm [5] 陈云飞. 基于微纳结构的制冷器[J]. 东南大学学报, 2006, 36(3): 356-360. doi: 10.3321/j.issn:1001-0505.2006.03.004 [6] 阮雷, 吴云峰, 陈镇龙, 等. 半导体超晶格微制冷器的研究进展[J]. 红外, 2007, 28(10): 1-5. doi: 10.3969/j.issn.1672-8785.2007.10.001 [7] 宫昌萌. 基于超晶格的微型热电制冷器[D]. 南京: 东南大学, 2006. [8] Christofferson J, Vashaee D, Shakouri A. Thermal characterization of thin film superlattice micro refrigerators[C]//IEEE SEMI-THERM Symposium, 2000: 49-54. [9] Christofferson J, Ezzahri Y, Shakouri A. Transient thermal imaging of pulsed- operation superlattice micro-refrigerators[C]// IEEE SEMI- THERM Symposium, 2009: 45-49. [10] ZENG Gehong, FAN Xiaofeng, LaBounty C, et al. Cooling power density of SiGe/Si superlattice micro refrigerators[J]. Materials Research Society, 2004, 793: 221-227. http://journals.cambridge.org/article_S1946427400103835 [11] YAO D J, KIM C J, CHEN G. MEMS thermoelectric micro- cooler[C]//International Conference on Thermoelectric, 2001: 401-404. [12] Goncalves L M, Couto C, Correia J H. Flexible thin-film planar peltier microcooler[C]//International Conference on Thermoelectrics, 2006: 327-331. [13] Ronggui Y, GANG C, Snyder G J, et al. Multistage thermoelectric micro coolers[C]//Inter Society Conference on Thermal Phenomena, 2002: 323-329. [14] 刘东立, 曹海山, 刘霄, 等. 微型JT制冷机实验研究进展[C]//低温工程大会, 2019: 199-204.LIU Dongli, CAO Haishan, LIU Xiao, et al. Experimental development of microminiature JT refrigerators[C]//Cryogenic Engineering Conference, 2019: 199-204. [15] Little W A. Design considerations for microminiature refrigerators using laminar flow heat exchangers[J]. NSB Speaial Publication, 1981, 607: 154-161. http://www.researchgate.net/publication/285264211_Design_Considerations_for_Microminiature_Refrigerators_Using_Laminar_Flow_Heat_Exchangers [16] FAN Zhonghui, D Harrison. Micromachining of capillary electro- phoresis injectors and separators on glass chips and evaluation of flow at capillary intersections[J]. Analytical Chemistry, 1994, 66: 177-184. doi: 10.1021/ac00073a029 [17] P P P M Lerou, G C F Venhorst, C F Berends, et al. Fabrication of a micro cryogenic cold stage using MEMS-technology[J]. Journal of Micromechanics and Microengineering, 2006, 16: 1919-1925. doi: 10.1088/0960-1317/16/10/002 [18] CAO H S, Mudaliar A V, Derking J H, et al. Design and optimization of a two-stage 28 K Joule-Thomson microcooler[J]. Cryogenics, 2012, 52: 51-57. doi: 10.1016/j.cryogenics.2011.11.003 [19] CAO H S, Vanapalli S, Holland H J, et al. A micromachined Joule-Thomson cryogenic cooler with parallel two-stage expansion[J]. International Journal of Refrigeration, 2016, 69: 223-231. doi: 10.1016/j.ijrefrig.2016.06.023 [20] CAO H S, Vanapalli S, Holland H J, et al. Characterization of a thermoelectric Joule-Thomson hybrid microcooler[J]. Cryogenics, 2016, 77: 36-42. doi: 10.1016/j.cryogenics.2016.04.012 [21] Little W A. Microminiature refrigeration[J]. American Institute of Physics, 1984: 661-680. doi: 10.1063/1.1137820 [22] ZHU Weibin, J W Michael, F N Gregory, et al. A Si/Glass bulk -micromachined cryogenic heat exchanger for high heat loads: fabrication, test, and application results[J]. Journal of Microelectromechanical System, 2010, 19(1): 38-47. doi: 10.1109/JMEMS.2009.2034322 [23] ZHU Weibin, Michael J W, Gregory F N, et al. A Joule-Thomson cooling system with a Si/Glass heat exchanger for 0.1-1 W heat loads[C]//Transducers, 2009: 2417-2420. [24] ZHU Weibin, Michael J W, Daniel W H, et al. Two approaches to micromachining Si heat exchanger for Joule-Thomson cryosurgical probes[C]//MEMS, 2007: 317-320. [25] ZHU Weibin, Michael J W, Gregory F N, et al. A perforated plate stacked Si/Glass heat exchanger with In-SITU temperature for Joule-Thomson coolers[C] //MEMS, 2008: 844-847. [26] Lerou P P P M, Brake H J M, Holland H J, et al. Insight into clogging of micromachined cryogenic coolers[J]. Applied Physics Letters, 2007, 90: 102-104. doi: 10.1063/1.2472194 [27] Tsai H L, Le P T. Self-sufficient energy recycling of light emitter diode/thermoelectric generator module for its active-cooling application[J]. Energy Conversion and Management, 2016, 118: 170-178. doi: 10.1016/j.enconman.2016.03.077 [28] LIN Shumin, MA Ming, WANG Jun, et al. Experiment investigation of a two-stage thermoelectric cooler under current pulse operation[J]. Applied Energy, 2016, 180: 628-636. doi: 10.1016/j.apenergy.2016.08.022 [29] ZHAO Dongliang, TAN Gang. Experimental evaluation of a prototype thermoelectric system integrated with PCM (Phase Change Material) for space cooling[J]. Energy, 2014, 68(4): 658-666. http://www.ingentaconnect.com/content/el/03605442/2014/00000068/00000001/art00070 [30] Derking J, Holland H, Lerou P, et al. Micromachined Joule-Thomson cold stages operating in the temperature range 80-250 K[J]. International Journal of Refrigeration, 2012, 35: 1200-1207. doi: 10.1016/j.ijrefrig.2012.01.008 -
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