Research Progress of Silicon-based BIB Infrared Detector
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摘要: 以锗基和硅基为主的阻挡杂质带（blocked impurity band，BIB）红外探测器的兴起有力推进了红外天文学的快速发展，其中硅基BIB红外探测器在特定波长的航天航空领域有着不可替代的地位。国外对硅基BIB红外探测器的研究已有40多年，以美国航空航天局（NASA）为主的科研机构已经实现了硅基BIB红外探测器在天文领域的诸多应用，而国内对硅基BIB红外探测器的研究尚处于起步阶段。本文首先阐述了硅基BIB红外探测器的工作原理，然后简单概述了器件结构和制备工艺，并对不同类型的硅基BIB探测器的性能进行了对比分析，之后介绍了其在天文探测中的应用，最后对硅基BIB红外探测器未来的发展进行了展望。Abstract: The rise of blocked impurity band (BIB) infrared detectors based on germanium and silicon has promoted the rapid development of infrared astronomy, among which silicon-based BIB infrared detectors with specific wavelengths play an irreplaceable role in the aerospace field. Research on silicon-based BIB infrared detectors has been conducted abroad for more than 40 years, and many of its applications in the astronomical field have been realized by NASA and its related research institutes. However, domestic research on silicon-based BIB infrared detectors is still in its infancy. In this paper, the working principle of silicon BIB infrared detectors is described first; then, the structure and fabrication process of the device are briefly summarized, the performance of different types of silicon BIB detectors is compared and analyzed, and its application in astronomical detection is described. Finally, the future development of silicon BIB infrared detectors is discussed.
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Key words:
- silicon-based BIB /
- infrared detector /
- astronomical detection
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图 1 硅基BIB红外探测器与其他类型红外探测器的探测波长范围及工作温度比较
Figure 1. Comparisons of the detection wavelength range and operating temperature of silicon-based BIB infrared detectors with other types of infrared detectors
图 2 硅基BIB红外探测器的结构和工作原理：(a) 非本征硅光电导探测器的工作原理示意图[10]；(b) 硅基BIB红外探测器的工作原理图[11]；(c) Si: As BIB红外探测器结构示意图[13]；(d) Si: Sb BIB红外探测器的器件结构图[14]；(e) 背照射式Si: Sb BIB探测器的结构示意图，其中Nd为中性施主的密度，Nd+为电离施主的浓度，Na-为电离受主的浓度[15]；(f) Si: Sb BIB探测器的红外吸收层在正的反偏电压下的平衡电荷分布图[15]
Figure 2. Structures and working mechanisms of silicon-based BIB infrared detectors: (a) Schematic diagram of the working principle of the ESPC detector[10]; (b) Schematic diagram of the working principle of the silicon-based BIB infrared detector[11]; (c) Structure diagram of the Si: As BIB infrared detector[13]; (d) Structure diagram of the Si: Sb BIB infrared detector[14]; (e) Schematic diagram of the back-illuminated Si: Sb BIB, where Nd is the density of neutral donors, Nd+ is the ionized donor density, and Na- is the density of ionized acceptors[15]; (f) Equilibrium charge distributions for the positive reverse-biased operation for the Si: Sb BIB infrared detector[15]
图 3 硅基BIB红外探测器的性能：(a) 用于Si: As IBC探测器辐射测试的低温杜瓦装置[38]；(b) 测试及计算得到的Si: As IBC探测器的响应量子效率曲线[38]；(c) Si: As IBC探测器的I-V测试曲线[38]；(d) 金属管壳封装的Si: Sb BIB探测器[14]；(e) Si: Sb BIB探测器的光谱量子效率曲线[14]；(f) Si: Sb BIB探测器的暗电流与温度的关系[14]；(g) Si: P BIB器件的PC光谱与远红外背景光谱，以及响应峰的指定[39]；(h) Si: Ga BIB探测器的光谱量子效率[40]；(i) Si: Ga BIB探测器与长波碲镉汞探测器的暗电流对比[40]
Figure 3. Performances of the silicon-based BIB infrared detectors: (a) Dewar configuration for Si: As IBC detector radiation testing[38]; (b) Responsive quantum efficiency curves of Si: As IBC detector[38]; (c) I-V testing curves of Si: As IBC detector[38]; (d) Metal shell packed Si: Sb BIB detector[14]; (e) Spectral quantum efficiency curve of Si: Sb BIB detector[14]; (f) Dark current as a function of temperature of Si: Sb BIB detector, measured at 1.5 V bias voltage[14]; (g) PC spectrum of the Si: P BIB device versus far-infrared background spectrum, and the designations of the response peak[39]; (h) Spectral QE of Si: Ga BIB detector[40]; (i) Dark current performance comparison of Si: Ga BIB detector with LWMCT detector[40]
图 4 天文用硅基BIB红外探测器的发展历程
Figure 4. Developments of silicon-based BIB infrared detectors for astronomical applications
图 5 国外硅基BIB红外探测器的研究进展：(a) 空间红外望远镜设备(SIRTF)上的128×128长波长红外焦平面组件[29]；(b) DRS公司的HF1024焦平面阵列，封装在84针无铅芯片载体上[40]；(c) 百万像素中红外阵列裸多路复用器[54]；(d) 无掺杂单晶衬底晶圆[54]；(e) Si: As BIB焦平面阵列的封装[55]；(f) 256×256 Si: As IBC阵列及其航天封装[57]；(g) 1024×1024 Si: As IBC阵列的红外传感器芯片[53]；(h) 1024×1024 Si: As IBC阵列的读出电路[58]；(i) 由双侧可粘扣的HF1024 Si: As和Si: Sb焦平面阵列组成的2048×2048焦平面阵列，像元间距为18 μm[40]
Figure 5. Research progresses of overseas silicon-based BIB infrared detectors: (a) SIRTF 128×128 long wavelength infrared focal plane array assembly[29]; (b) DRS HF1024 FPA packaged in 84-pin leadless chip carrier[40]; (c) A Mega pixel MIR bare multiplexer[54]; (d) Undoped single-crystal substrate wafer[54]; (e) Packaging of the BIB focal plane arrays[55]; (f) 256×256 Si: As IBC array in flight mount[57]; (g) Photo of a 1024×1024 Si: As IBC SCA[53]; (h) SB-291 ROIC for 1024×1024 Si: As IBC array[58]; (i) 2048×2048 FPA with 18-micron pixel pitch composed of 2-side buttable HF1024 Si: As and Si: Sb FPAs[40]
图 6 国内硅基BIB红外探测器的研究进展：(a) 平面型Si: P BIB探测器结构示意图[65]；(b) 垂直型Si: P BIB探测器模型[58]；(c) Si: P BIB探测器在2 V偏压和不同温度下的响应光谱[58]；(d) 等离子体调谐太赫兹探测器横截面示意图[59]；(e) 不同周期性孔结构（PHSs）的Si: P BIB探测器的归一化光电流谱[59]；(f) Si: Ga BIB探测器在不同功能区上的层状材料结构示意图[60]；(g) Si: Ga BIB探测器不同温度下的响应谱[60]；(h) 金属光栅/硅基BIB太赫兹探测器的工作原理图[61]；(i) 有金属光栅的器件（参数：p=7 μm，d=5 μm，DR=2/7）与无金属光栅的器件的实验光谱响应对比[61]
Figure 6. Research progresses of domestic silicon-based BIB infrared detectors: (a) Schematic diagram of the planar type Si: P BIB detector structure[65]; (b) Vertical type Si: P BIB detector model[58]; (c) Response spectrum of the Si: P BIB detector at 2 V bias voltage with different temperatures[58]; (d) Schematic representation of the cross section of the plasma-tuning THz detector[59]; (e) The normalized photocurrent spectrum of the Si: P BIB detectors for different periodic pore structures (PHSs)[59]; (f) Schematic diagram of the layered material structure of the Si: Ga BIB detector in different functional areas[60]; (g) Response spectrum of the Si: Ga BIB detector at different temperatures[60]; (h) Mechanism of the metal-grating/silicon-based BIB THz detector[61]; (i) Comparison of the experimental spectral response of devices with metal gratings (parameters: p=7 μm, d=5 μm, DR=2/7) with devices with metal-free gratings[61]
图 7 硅基BIB红外探测器的天文应用[72]：(a) 斯皮策太空望远镜；(b) 斯皮策太空望远镜观测到的“红蝴蝶”星系；(c) WISE捕捉的最古老的超新星RCW 86的图像；(d) 水瓶座/SAC-D航天探测器；(e) 平流层天文台；(f)平流层天文台捕捉的恒星合并的快照；(g) 詹姆斯·韦伯空间望远镜（JWST）；(h) JWST的近红外照相机捕捉的第一张全彩图像；(i) COBE在太空中运行的示意图
Figure 7. Astronomical applications of the silicon-based BIB infrared detectors[72]: The spitzer space telescope; (b) The "red butterfly" galaxy was observed by the spitzer space telescope; (c) An image of the oldest supernova RCW 86 captured by WISE; (d) The aquarius/SAC-D space probe; (e) Stratospheric observatory for infrared astronomy; (f) Snapshot of stellar mergers captured by SOFIA; (g) The James Webb Space Telescope; (h)The first full color image captured by the near-infrared camera of the JWST; (i) Schematic representation of the cosmic background explorer operating in space
表 1 硅基BIB红外探测器的部分工艺参数
Table 1. Partial process parameters of the silicon-based BIB infrared detector
Year Material Thickness of IRAL/μm Thickness of blocking layer/μm Doping concentration of IRAL/cm-3 Fabrication method of epitaxial layer Institution Ref. 1979 Si: As 6−10 1−4 7×1017 CVD Rockwell [11] 1992 Si: Sb 17 3.5 1−8×1017 CVD Rockwell [15] 1999 Si: B 4.5 3 1×1018 - - [16] 2007 Si: As 10 - 4×1018 - DRS [17] 2007 Si: P - - 4×1018 - DRS [17] 2018 Si: As 15 - 1×1018 - NIST [18] 
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表 2 国外公司生产的硅基BIB红外探测器的性能参数
Table 2. Performance parameters of silicon-based BIB infrared detectors produced by foreign companies
Year Material Technology FPA format Pixel size/μm2 Pixel pitch/μm Operating temperature range/K Wavelength
range/μmDark current Quantum efficiency/% Institution Applications Ref. 2012 Si: Sb BIB 1024×1024 18 - 5-12 14-38 0.1 e/s 60 DRS Wide-field infrared survey explorer [14] 1992 Si: Sb BIB 128×128 - - 7 2-40 - - Rockwell Space infrared telescope facility [15] 2018 Si: As BIB - - - 7-10 2-30 10-12 A/mm2 60 NIST Missile defense transfer radiometer [18] 1986 Si: As BIB 10×50 - - 12 - 12.3 pA - Rockwell - [19] 1991 Si: As BIB 128×128 75 - 11 - < 0.1 nA - Rockwell Space infrared telescope facility [20] 1993 Si: As BIB 256×256 30 - 12 - 18 e-/s 57 HTC Space infrared telescope facility [21] 1995 Si: Ga ESPC 128×192 75 - ≤10 5-17 0 30 LETI/LIR European transonic windtunnel [22] 1998 Si: As BIB 256×256 30 - 6-7 - < 100 e-/s 40 RVS Infrared imaging surveyor [23] 1998 Si: As BIB 320×240 - 50 6 2-28 100 e-/s 40-55 SBRC SUBARU [24] 2000 Si: As BIB 256×256 - 25 6 5-28 3.8 e-/s 84 RVS Space infrared telescope facility [25] 2001 Si: As BIB 320×240 - 50 6-12 2-28 ≤100 e-/s > 40 RVS Mid-infrared spectrometer and imager [26] 2001 Si: As BIB 1024×1024 - 27 6-8 5-30 0.3 e-/s 45 RVS Next generation space telescope [27] 2001 Si: As BIB 1024×1024 - 27 6 5-30 < 1 e-/s 50 RVS Stratospheric observatory for infrared astronomy [28] 2003 Si: As BIB 128×128 - 75 - - 0.49-2.9 e-/s 84 DRS Wide-field infrared explorer [29] 2003 Si: Sb BIB 128×128 - 75 - - 5.3-12.9 e-/s 51 DRS Wide-field infrared explorer [29] 2003 Si: As BIB 256×256 50 - 4.7 5-25 - 56 DRS Stratospheric observatory for infrared astronomy [30] 2004 Si: As BIB 256×256 25 - 6.7-7.1 5-28 0.1 e-/s > 50 RVS James Webb space telescope [31] 2005 Si: As BIB 1024×1024 - 18 6 5-28 < 10 e-/s > 57 DRS Wide-field infrared survey explorer/James Webb space telescope [32] 2006 Si: As BIB 1024×1024 - 18 7.8 7.5-28 < 100 e-/s > 60 DRS Wide-field infrared survey explorer [33] 2008 Si: As BIB 1024×1024 30 - 7-9 3-28 1 e-/s > 40 RVS AQUARIUS [34]
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