一种基于图像处理的红外微扫描器件测量与校准的方法

王贵全; 徐志文; 段永进; 施浩坤; 蒋旭珂; 李彦生; 张雨璇; 张劼

一种基于图像处理的红外微扫描器件测量与校准的方法

昆明北方红外技术股份有限公司, 云南昆明 650217

详细信息

作者简介:
王贵全（1981-），男，高级工程师，本科，主要从事红外整机系统检测与应用的相关研究。E-mail：119455225@qq.com

中图分类号: TN219
计量
- 文章访问数: 99
- HTML全文浏览量: 43
- PDF下载量: 20
- 被引次数: 0
出版历程
- 收稿日期: 2021-11-19
- 修回日期: 2021-12-16
- 刊出日期: 2022-09-20

An Infrared Micro Scanner Measurement and Calibration Method Based on Image Processing

Kunming North Infrared Technology Corporation Limited, Kunming 650217, China

摘要

摘要: 在以红外焦平面为核心的红外成像系统中，微扫描器件可以有效提高整个系统的空间分辨率。针对微扫描器件的检测，本文提出了一种基于图像处理的测量与校准方法，并搭建了一套检测系统用于对微扫描器件进行检测与校准。以某型微扫描器件为测试对象，实验结果表明本文所提方法在测量精度、重复精度以及不确定度方面均达到了良好的效果，可以为微扫描器件的设计、生产提供基础支撑。
- 红外焦平面 /
- 微扫描器件 /
- 检测方法 /
- 图像处理
Abstract: In infrared imaging systems, in which the core is an infrared focal plane array, a microscanner can enhance the spatial resolution of the entire system. To test microscanners, this study developed a measurement and calibration method based on image processing and built a system to measure and calibrate microscanners. Using a microscanner as a test subject, the test results indicate that the proposed method has a significant effect on the measurement accuracy, repetition accuracy, and uncertainty. The method can provide technical support for the design and manufacture of microscanners.
- infrared focal plane array /
- micro scanner /
- measurement method /
- image processing

HTML全文

图 1 微扫描器件检测装置

Figure 1. The micro scanner test instrument

下载: 全尺寸图片幻灯片

图 2 微扫描器件检测装置上位机软件界面

Figure 2. The user interface of the software for the test instrument

下载: 全尺寸图片幻灯片

图 3 测试装置原理

Figure 3. The schematic diagram of the micro scanner test instrument

下载: 全尺寸图片幻灯片

图 4 测试装置结构图

Figure 4. The structure of the micro scanner test instrument

下载: 全尺寸图片幻灯片

图 5 本文实验中的某型微扫描器件

Figure 5. The micro scanner in this paper

下载: 全尺寸图片幻灯片

图 6 靶标中心坐标获取流程图

Figure 6. The flow chart of the target center coordinate detection

下载: 全尺寸图片幻灯片

图 7 靶标中心坐标计算示例

Figure 7. The example of the center coordinate calculation of the target

下载: 全尺寸图片幻灯片

图 8 微扫描器件检测流程

Figure 8. The flow chart of the micro scanner testing

下载: 全尺寸图片幻灯片

图 9 微扫描器件校准流程

Figure 9. Flow chart of the micro scanner calibration

下载: 全尺寸图片幻灯片

图 10 校准后的轨迹与设计理论轨迹比较

Figure 10. The comparison between the trajectory after calibration and design trajectory

下载: 全尺寸图片幻灯片

表 1 数学模型参数p计算结果

Table 1. Calculation results of parameter p

No.	The X direction displacement (pixel)	The Y direction displacement (pixel)	The piezo positioner displacement/μm
1	-0.002	-0.004	0
2	0.621	0.639	5
3	1.398	2.206	10
4	2.875	3.327	15
5	3.655	4.573	20
6	5.111	5.878	25
7	6.474	6.993	30
8	7.533	8.109	35
9	8.661	9.221	40
10	9.81	10.321	45
11	10.616	11.579	50
12	12.042	12.871	55
The parameter p of the X direction: 0.2260 pixel/μm, the parameter p of the Y direction: 0.2364 pixel/μm

下载: 导出CSV

表 2 某型微扫描器件的测试结果

Table 2. The test results of a micro scanner

The design displacement	No.	X direction displacement test		Y direction displacement test
The design displacement	No.	Real value	Difference	Real value	Difference
12.5 μm	1	12.573	0.073	12.089	-0.411
	2	12.303	-0.197	12.221	-0.279
	3	12.567	0.067	12.121	-0.379
	4	12.485	-0.015	12.231	-0.269
	5	12.506	0.006	12.075	-0.425
	6	12.504	0.004	12.053	-0.447
	7	12.576	0.076	12.231	-0.269
	8	12.208	-0.292	12.221	-0.279
	9	12.507	0.007	12.113	-0.387
	10	12.510	0.01	12.113	-0.387
	11	12.450	-0.05	12.072	-0.428
	12	12.372	-0.128	12.157	-0.343
	13	12.451	-0.049	12.174	-0.326
	14	12.455	-0.045	12.178	-0.322
	15	12.448	-0.052	12.173	-0.327
	16	12.498	-0.002	12.149	-0.351
	17	12.486	-0.014	12.083	-0.417
	18	12.366	-0.134	12.078	-0.422
	19	12.454	-0.046	12.158	-0.342
	20	12.457	-0.043	12.133	-0.367
	Mean	12.4588	-0.0412	12.1412	-0.3589

下载: 导出CSV

表 3 本文实验不确定度汇总

Table 3. The summary of the test uncertainty in this paper

Uncertainty component U_i	Uncertainty source	Uncertainty	Sensitivity coefficient c_i	$ \left\| {{c_i}} \right\| \cdot {U_i} $
U(m) of the X direction	The repeat test of the X direction	0.02014 μm	c₁=4.425	0.08912 μm
U(m) of the Y direction	The repeat test of the Y direction	0.01278 μm	c₁=4.230	0.05406 μm
U(m₁) of the X direction	The error of the piezo positioner at the X direction	-0.0041 μm	c₂=2.791	-0.01144 μm
U(m₁) of the Y direction	The error of the piezo positioner at the Y direction	-0.0045 μm	c₂=2.699	-0.01215 μm
The synthetic uncertainty of the X direction: 0.08985 μm; The expand uncertainty of the X direction: 0.17970 μm The synthetic uncertainty of the Y direction：0.05541 μm; The expand uncertainty of the Y direction: 0.11082 μm

下载: 导出CSV

参考文献(16)

[1]	Bagavathiappan S, Lahiri B B, Saravanan T, et al. Infrared thermography for condition monitoring–a review[J]. Infrared Physics & Technology, 2013, 60: 35-55.
[2]	Kogure S, Inoue K, Ohmori T, et al. Infrared imaging of an A549 cultured cell by a vibrational sum-frequency generation detected infrared super resolution microscope[J]. Optics Express, 2010, 18(13): 13402-13406. doi: 10.1364/OE.18.013402
[3]	Lanfrey D B, Trinolet P, Pistone F, et al. New IR detectors with small pixel pitch and high operating temperature[C]//Proc. of SPIE, 2010, 7854: 78540M.
[4]	吕侃, 王世勇. 超分辨率技术在红外微扫描中的应用[J]. 电子设计工程, 2011, 19(13): 166-169. doi: 10.3969/j.issn.1674-6236.2011.13.050 LV Kan, WANG Shiyong. Application of super-resolution techniques in infrared micro-scanning[J]. Electronic Design Engineering, 2011, 19(13): 166-169. doi: 10.3969/j.issn.1674-6236.2011.13.050
[5]	张良, 仇振安, 杨小儒, 等. 红外系统微扫描技术研究[J]. 激光与光电子学进展, 2012, 49(4): 1-5. https://www.cnki.com.cn/Article/CJFDTOTAL-JGDJ201204024.htm ZHANG Liang, QIU Zhen'an, YANG Xiaoru, et al. Research of infrared micro-scanning technology[J]. Laser & Optoelectronics Progress, 2012, 49(4): 042302 https://www.cnki.com.cn/Article/CJFDTOTAL-JGDJ201204024.htm
[6]	吴新社, 邓芳轶, 陈敏, 等. 旋转式红外微扫描器研制[J]. 红外与毫米波学报, 2011, 30(3): 263-267. https://www.cnki.com.cn/Article/CJFDTOTAL-HWYH201103017.htm WU Xinshe, DENG Fangyi, CHEN Min, et al. Development of rotary infrared micro-scanner[J]. Journal of Infrared and Millimeter Waves, 2011, 30(3): 263-267. https://www.cnki.com.cn/Article/CJFDTOTAL-HWYH201103017.htm
[7]	王学伟, 李珂, 王世立. 红外成像系统微扫描成像重建算法研究[J]. 光电工程, 2012, 39(12): 122-126. https://www.cnki.com.cn/Article/CJFDTOTAL-GDGC201212023.htm WANG Xuewei, LI Ke, WANG Shili. Microscanning reconstruction algorithm for IR imaging system[J]. Opto-Electronic Engineering, 2012, 39(12): 122-126. https://www.cnki.com.cn/Article/CJFDTOTAL-GDGC201212023.htm
[8]	代少升, 张德州, 崔俊杰, 等. 基于微扫描的红外超分辨率成像系统的设计[J]. 半导体光电, 2017, 38(1): 103-106, 112. https://www.cnki.com.cn/Article/CJFDTOTAL-BDTG201701026.htm DAI Shaosheng, ZHANG Dezhou, CUI Junjie, et al. Design of infrared super-resolution imaging system based on micro-scanning[J]. Semiconductor Optoelectronics, 2017, 38(1): 103-106, 112. https://www.cnki.com.cn/Article/CJFDTOTAL-BDTG201701026.htm
[9]	黄燕, 沈飞, 黄整章, 等. 压电式高精度位移微扫描控制系统设计[J]. 光学精密工程, 2016, 24(10s): 454-460. HUANG Yan, SHEN Fei, HUANG Zhengzhang, et al. Micro-scanning control system design for piezoelectric high-precision displacement[J]. Editorial Office of Optics and Precision Engineering, 2016, 24(10s): 454-460.
[10]	王忆锋, 侯辉, 冯雪艳. 红外焦平面器件微扫描技术的发展[J]. 红外技术, 2013, 35(12): 751-758. http://hwjs.nvir.cn/article/id/hwjs201312002 WANG Yifeng, HOU Hui, FENG Xueyan, Development of microscan techniques in infrared focal plane array[J]. Infrared Technology, 2013, 35(12): 751-758. http://hwjs.nvir.cn/article/id/hwjs201312002
[11]	王林波, 王延杰, 邸男, 等. 基于几何特征的圆形标志点亚像素中心定位[J]. 液晶与显示, 2014, 29(6): 1003-1009. https://www.cnki.com.cn/Article/CJFDTOTAL-YJYS201406024.htm WANG Linbo, WANG Yanjie, DI Nan, et al. Subpixel location of circle target center based on geometric features[J]. Chinese Journal of Liquid Crystals and Displays, 2014, 29(6): 1003-1009. https://www.cnki.com.cn/Article/CJFDTOTAL-YJYS201406024.htm
[12]	梁智滨, 吴鹏飞, 李灵巧, 等. 基于改进Zernike矩和均值漂移的插针位置检测方法[J]. 桂林电子科技大学学报, 2021, 41(4): 305-311. https://www.cnki.com.cn/Article/CJFDTOTAL-GLDZ202104008.htm LIANG Zhibin, WU Pengfei, LI Lingqiao, et al. Pin position detection based on improved Zernike moment and mean shift[J]. Journal of Guilin University of Electronic Technology, 2021, 41(4): 305-311. https://www.cnki.com.cn/Article/CJFDTOTAL-GLDZ202104008.htm
[13]	田光宝, 王见, 王博文. 单目相机非合作目标提取及位姿检测[J]. 红外与激光工程, 2021, 50(12): 20210166. https://www.cnki.com.cn/Article/CJFDTOTAL-HWYJ202112050.htm TIAN Guangbao, WANG Jian, WANG Bowen. Monocular camera non-cooperative target extraction and pose detection[J]. Infrared and Laser Engineering, 2021, 50(12): 20210166. https://www.cnki.com.cn/Article/CJFDTOTAL-HWYJ202112050.htm
[14]	Ghosal S, Mecrotra R. Orthogonal moment operator for subpixel edge detection[J]. Pattern Recognition, 1993, 26(2): 295-306.
[15]	卢达, 白静芬, 林繁涛, 等. 基于映射常数的动态量值不确定度评定方法[J]. 电测与仪表, 2022, 59(6): 53-59. https://www.cnki.com.cn/Article/CJFDTOTAL-DCYQ202206008.htm LU Da, BAI Jingfen, LIN Fantao, et al. Evaluation of uncertainty for dynamic values based on mapping constants[J]. Electrical Measurement & Instrumentation, 2022, 59(6): 53-59. https://www.cnki.com.cn/Article/CJFDTOTAL-DCYQ202206008.htm
[16]	中国国家标准化管理委员会. 测量不确定度评定和表示: GB/T 27418-2017[S]. 北京: 中国标准出版社, 2018. Standard Administration. Guide to Evaluation and Expression of Uncertainty in Measurement: GB/T 27418-2017[S]. Beijing: Standards Press of China, 2018.