热电堆型激光功率计设计与仿真

雷程; 武学占; 梁庭; 马野; 关一浩; 董志超; 李强; 齐蕾

热电堆型激光功率计设计与仿真

雷程^1,,
武学占¹,
梁庭¹,
马野¹,
关一浩¹,
董志超¹,
李强¹,
齐蕾²

1.
中北大学仪器科学与动态测试教育部重点实验室, 山西太原 030051
2.
北方自动控制技术研究所, 山西太原 030006

基金项目:

中央引导地方科技发展资金 YDZX20201400001664

山西省自然科学基金项目 201801D221203

高等学校科技创新项目 1810600108MZ

详细信息

作者简介:
雷程（1987-），男，博士，高级实验师，硕士生导师，主要从事微纳红外传感、微纳压力传感及微纳器件制造与系统集成方面的研究。E-mail：leicheng@nuc.edu.com

中图分类号: TM933.3
计量
- 文章访问数: 144
- HTML全文浏览量: 74
- PDF下载量: 36
- 被引次数: 0
出版历程
- 收稿日期: 2021-06-25
- 修回日期: 2021-10-16
- 刊出日期: 2022-02-20

Design and Simulation of Thermopile Laser Power Meter

1.
Key Laboratory of Instrumentation Science & Dynamic Measurement of Ministry of Education, North University of China, Taiyuan 030051, China
2.
North Automatic Control Technology Institute, Taiyuan 030006, China

摘要

摘要: 针对紫外、可见、红外等激光器输出功率测试需求，提出一种由传热体、吸收层、绝缘层和热电偶构成的热电堆型激光功率计。结合热效应和塞贝克效应理论，采用Solidworks三维设计软件构建不同关键结构尺寸的模型，通过ANSYS Workbench仿真软件建立了热电耦合仿真分析模型，分析关键结构尺寸参数对输出电压以及温度分布的影响关系。采用机械加工、镀膜和喷砂工艺设计热电堆型激光功率计，设计封装结构和电路补偿对输出电压进行放大和校准，结果表明，传热体厚度、热偶条对数和长度都是影响激光功率计输出电压的关键性因素。
- 激光功率计 /
- 热效应 /
- 塞贝克效应 /
- 热电堆 /
- 热电偶 /
- 有限元仿真分析
Abstract: To address the need to test the output power of ultraviolet, visible, and infrared lasers, this study proposes a thermopile laser power meter composed of a heat transfer body, an absorption layer, an insulating layer, and a thermocouple. Combining the thermal effect and Seebeck effect theory, Solidworks 3D design software is used to build models of different key structure sizes, and a thermoelectric coupling simulation analysis model is established using ANSYS Workbench simulation software to analyze the influence of key structure size parameters on the output voltage and temperature distribution. The thermopile laser power meter is designed using mechanical processing, coating, and sandblasting, and the package structure and circuit compensation are designed to amplify and calibrate the output voltage. The results show that the key factors affecting the output voltage of the laser power meter are the thickness of the heat transfer body, the number of thermal couples, and the length of the thermal couple.
- laser power meter /
- thermal effect /
- Seebeck effect /
- thermopile /
- thermocouple /
- finite element simulation analysis

HTML全文

图 1 激光入射激光功率计图

Figure 1. Laser incident laser power meter diagram

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图 2 激光入射传热体截面导热图

Figure 2. The cross-sectional thermal conductivity diagram of the laser incident heat transfer body

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图 3 塞贝克效应

Figure 3. Seebeck effect

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图 4 用于计算热传导的结构示意图

Figure 4. Schematic diagram of the structure used to calculate heat conduction

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图 5 激光功率计的结构示意图：(a)正面立体图；(b)背面图

Figure 5. Structure diagram of laser power meter: (a) Frontal stereogram; (b) Reverse view

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图 6 激光功率计电压分布云图

Figure 6. Cloud image of voltage distribution of laser power meter

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图 7 激光功率计稳态热梯度云图

Figure 7. Steady state thermal gradient cloud image of laser power meter

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图 8 传热体不同厚度下的输出电压

Figure 8. The output voltage of heat transfer body with different thickness

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图 9 传热体不同厚度下的最高点温度

Figure 9. The maximum temperature of the heat transfer body under different thicknesses

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图 10 不同热偶条长度下的输出电压

Figure 10. Output voltage at different thermocouple lengths

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图 11 不同热偶条长度下的最高点温度

Figure 11. Maximum point temperature at different thermocouple Lengths

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图 12 不同热偶条对数下的输出电压

Figure 12. Output voltage for logarithms of different thermocouple bars

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图 13 热电堆激光功率计的探头制备工艺设计

Figure 13. Design of probe preparation for thermopile laser power meter

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图 14 磁控溅射原理

Figure 14. The principle of magnetron sputterin

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图 15 激光功率计封装结构

Figure 15. Laser power meter packaging structure

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表 1 主要的热电耦材料属性设置

Table 1. Main thermoelectric material property Settings

Thermoelectric materials	Thermal conductivity/(W/m·℃)	The Seebeck coefficient/(V/℃)	Resistivity/(Ω·m)
Copper Constantan	397 21	6.5$ \times $10⁻⁵ −3.5$ \times $10⁻⁵	1.72$ \times $10⁻⁸ 4.8$ \times $10⁻⁷

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