[1]张正君,李婧雯,牛鹏杰,等.碱腐蚀工艺对微通道板性能的影响研究[J].红外技术,2020,42(8):752-757.[doi:doi:10.11846/j.issn.1001_8891.202008008]
 ZHANG Zhengjun,LI Jingwen,NIU Pengjie,et al.Micro-channel Plate Etching Technology in Lye[J].Infrared Technology,2020,42(8):752-757.[doi:doi:10.11846/j.issn.1001_8891.202008008]
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碱腐蚀工艺对微通道板性能的影响研究
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《红外技术》[ISSN:1001-8891/CN:CN 53-1053/TN]

卷:
42卷
期数:
2020年第8期
页码:
752-757
栏目:
出版日期:
2020-08-23

文章信息/Info

Title:
Micro-channel Plate Etching Technology in Lye
文章编号:
1001-8891(2020)-08-0752-06
作者:
张正君李婧雯牛鹏杰丛晓庆邱祥彪王 健
北方夜视技术股份有限公司南京分公司,江苏 南京 210006
Author(s):
ZHANG ZhengjunLI JingwenNIU PengjieCONG XiaoqingQIU XiangbiaoWANG Jian
Nanjing Branch, North Night Vision Technology Co., LTD., Nanjing 211106, China
关键词:
微通道板腐蚀碱溶液碱金属增益
Keywords:
micro-channel plate etching lye alkali metals gain
分类号:
TN223
DOI:
doi:10.11846/j.issn.1001_8891.202008008
文献标志码:
A
摘要:
In this study, the effect of lye corrosion time on the gain of a microchannel plate is investigated. By adjusting the lye-etching time, the concentration of alkali metals and the roughness of the channel inner wall are visualized via X-ray photoelectron spectroscopy and atomic force microscopy. Results show that reducing the lye-etching time can reduce the loss of alkali metal elements in the inner wall of the microchannel plate without affecting its roughness, thereby improving the secondary electron emission capacity and the microchannel plate gain. Further tests show that higher alkali metals can improve the gain of both the microchannel plates and image intensifier tubes, whereas the noise coefficient in the image intensifier tube does not increase with reduced lye-etching time.
Abstract:
In this study, the effect of lye corrosion time on the gain of a microchannel plate is investigated. By adjusting the lye-etching time, the concentration of alkali metals and the roughness of the channel inner wall are visualized via X-ray photoelectron spectroscopy and atomic force microscopy. Results show that reducing the lye-etching time can reduce the loss of alkali metal elements in the inner wall of the microchannel plate without affecting its roughness, thereby improving the secondary electron emission capacity and the microchannel plate gain. Further tests show that higher alkali metals can improve the gain of both the microchannel plates and image intensifier tubes, whereas the noise coefficient in the image intensifier tube does not increase with reduced lye-etching time.

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备注/Memo

备注/Memo:
收稿日期:2020-06-08;修订日期:2020-07-02.
作者简介:张正君(1972-),女,研究员级高级工程师,硕士,主要研究方向为微通道板性能改进与技术开发。E-mail:julle446@163.com。
更新日期/Last Update: 2020-08-19