[1]米高园,杨崇民,张建付,等.离子束溅射Al2O3薄膜及其在蓝宝石窗口中的应用[J].红外技术,2019,41(10):902-907.[doi:doi:10.11846/j.issn.1001_8891.201910002]
 MI Gaoyuan,YANG Chongmin,ZHANG Jianfu,et al.Ion Beam Sputtering Alumina Film and Application in Sapphire Optical Windows[J].Infrared Technology,2019,41(10):902-907.[doi:doi:10.11846/j.issn.1001_8891.201910002]
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离子束溅射Al2O3薄膜及其在蓝宝石窗口中的应用
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《红外技术》[ISSN:1001-8891/CN:CN 53-1053/TN]

卷:
41卷
期数:
2019年第10期
页码:
902-907
栏目:
出版日期:
2019-10-21

文章信息/Info

Title:
Ion Beam Sputtering Alumina Film and Application in Sapphire Optical Windows
文章编号:
1001-8891(2019)10-0902-06
作者:
米高园杨崇民张建付王松林刘青龙朱筱群李明伟
西安应用光学研究所,陕西 西安 710065
Author(s):
MI GaoyuanYANG ChongminZHANG JianfuWANG SonglinLIU QinglongZHU XiaoqunLI Mingwei
Xi’an Institute of Applied Optics, Xi’an 710065, China
关键词:
离子束溅射Al2O3薄膜光学窗口环境适应性
Keywords:
ion beam sputtering Al2O3 film optical window environmental adaptability
分类号:
O484.1
DOI:
doi:10.11846/j.issn.1001_8891.201910002
文献标志码:
A
摘要:
 为了研究Al2O3薄膜在蓝宝石光学窗口中的应用,采用离子束溅射技术制备了不同工艺条件下的Al2O3薄膜,根据薄膜的测试结果对薄膜的折射率和消光系数进行了拟合,分析了工艺条件对Al2O3薄膜性能的影响。在蓝宝石窗口上用ZnS和Al2O3作为高、低折射率材料,设计并制备了电视(600~900 nm)和中红外(3.4~4.8  mm)双波段高效减反射薄膜,测试结果表明,薄膜的减反射效果良好,具有较强的环境适应性,适合于作为光学窗口薄膜。而Al2O3薄膜吸潮引起的2.8~3.5  mm波段的吸收,以及蓝宝石基片在4.0  mm之后的吸收是造成透射率较低的主要原因。
Abstract:
 To study the application of Al2O3 films in optical windows, thin Al2O3 films were prepared using ion beam sputtering technology under different process conditions. According to the test results of the thin films, the refractive index and extinction coefficient of the films were fitted, and the influence of the process conditions on the performance of the thin Al2O3 films was analyzed. ZnS and Al2O3  were used as materials on a sapphire substrate to design and prepare high-efficiency anti-reflection films. The test results demonstrated that the films exhibited a good anti-reflection effect and strong environmental adaptability, which made them suitable for mid-infrared windows. The absorption of the 2.8–3.5 mm band caused by the moisture absorption of the Al2O3  films and the absorption of substrates longer than 4.0  mm were the main reasons for the lower transmission.

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备注/Memo

备注/Memo:
收稿日期:2019-05-01;修订日期:2019-10-08.
作者简介:米高园(1985-),女,工程师,从事光学薄膜技术的研究。E-mail:migaoyuan@163.com。
基金项目:国防基础科研计划资助。
更新日期/Last Update: 2019-10-22