[1]赵伟林,赵 恒,曾进能,等.TiO2薄膜基底上制作多碱光电阴极的探索研究[J].红外技术,2019,41(10):895-901.[doi:10.11846/j.issn.1001_8891.201910001]
 ZHAO Weilin,ZHAO Heng,ZENG Jinneng,et al.Analysis of Multi Alkali Photocathode Deposition on TiO2 Film[J].Infrared Technology,2019,41(10):895-901.[doi:10.11846/j.issn.1001_8891.201910001]
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TiO2薄膜基底上制作多碱光电阴极的探索研究
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《红外技术》[ISSN:1001-8891/CN:CN 53-1053/TN]

卷:
41卷
期数:
2019年第10期
页码:
895-901
栏目:
出版日期:
2019-10-21

文章信息/Info

Title:
Analysis of Multi Alkali Photocathode Deposition on TiO2 Film
文章编号:
1001-8891(2019)10-0895-07
作者:
赵伟林12赵 恒1曾进能1赵学峰1常 乐1李廷涛1李晓峰12
1. 北方夜视技术股份有限公司,云南 昆明 650217;2. 微光夜视技术重点实验室,陕西 西安 710065
Author(s):
ZHAO Weilin12ZHAO Heng1ZENG Jinneng1ZHAO Xuefeng1CHANG Le1LI Tingtao1LI Xiaofeng12
1. North Night Vision Technology Co. Ltd, Kunming 650217, China;
2. Science and Technology on Low-light-level Night Vision Laboratory, Xi’an 710065, China
关键词:
多碱阴极TiO2减反膜原子层沉积Na元素渗透钝化膜
Keywords:
multi alkali cathode TiO2 anti-reflection film atomic layer deposition Na permeation Al2O3 passive film
分类号:
O462.3
DOI:
10.11846/j.issn.1001_8891.201910001
文献标志码:
A
摘要:
在TiO2薄膜基底上制作多碱光电阴极,发现多碱光电阴极制作工艺无法正常进行,多碱光电阴极的颜色为暗黑色,并且阴极灵敏度非常低,而正常的多碱光电阴极应为红褐色。其中TiO2薄膜基底利用原子层沉积(ALD)工艺制备在玻璃窗上,并且具有锐钛矿晶体结构。X射线衍射仪(XRD)分析发现,制作多碱阴极后的TiO2薄膜样品锐钛矿衍射峰基本消失,另外X射线光电子能谱(XPS)分析发现该TiO2薄膜样品不同深度均存在Na元素,由此表明是Na元素渗透到TiO2薄膜中,破坏了薄膜的晶体结构,并且导致多碱光电阴极灵敏度非常低。为此提出了一种在制作多碱光电阴极之前,在TiO2薄膜上利用ALD工艺制作一层Al2O3钝化膜的方法。经过实验验证,证实该方法可以有效避免Na元素渗透到TiO2薄膜,同时多碱光电阴极制作过程可正常进行,多碱光电阴极的颜色为红褐色,阴极灵敏度超过800  mA/lm。这为将来深入研究采用TiO2薄膜作为多碱光电阴极的减反膜打下了基础。
Abstract:
In this study, experiments involving the deposition of a multi alkali photocathode on a TiO2 film were conducted. However, the manufacturing process of photocathode deposition did not proceed smoothly during this experiment. Furthermore, the photocathode was black in color (whereas it should be rufous under normal conditions) and its sensitivity was very low. In this experiment, a TiO2 film with anatase structure was deposited on a glass window by the atomic layer deposition (ALD) method, and the film was subsequently analyzed. The analysis results of X-ray diffraction (XRD) indicated that the diffraction peak of the anatase almost disappeared. In addition, the analysis results of X-ray photoelectron spectra (XPS) indicated that Na permeated into the TiO2 film. These results prove that the crystal structure of the TiO2 film was destroyed by Na permeation, causing very low sensitivity of the photocathode. Thus, an Al2O3 passive film deposited by the ALD method is proposed to address the Na permeation problem. Another experiment, in which a multi alkali photocathode was deposited on the TiO2 film with an Al2O3passive film, proved that the Na permeation is effectively prevented by the Al2O3 passive film. Importantly, the manufacturing process of photocathode deposition proceeded smoothly during the second experiment, the color of the photocathode was rufous, and the sensitivity of the photocathode was higher than 800 μA/lm. These experiments form the basis of research on employing TiO2 films as antireflection films of multi alkali photocathodes in the future.

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相似文献/References:

[1]李晓峰,李燕红,石峰,等. Na2KSb光电阴极与GaAs光电阴极比较研究[J].红外技术,2013,35(03):173.
 LI Xiao-feng,LI Yan-hong,SHI Feng,et al. Study on the Difference between GaAs Cathode and Na2KSb Cathode[J].Infrared Technology,2013,35(10):173.
[2]李晓峰,瞿利平,黄建民,等. 超二代像增强器多碱阴极电子逸出机理研究[J].红外技术,2012,34(12):729.
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[3]李晓峰,赵学峰,瞿利平,等.多碱阴极激活过程中逸出功及电子跃迁变化研究[J].红外技术,2013,35(04):202.
 LI Xiao-feng,ZHAO Xue-feng,QU Li-ping,et al. Study on Variation of Work Function and Electron Transition of Multi Alkali Cathode during Cs Activation and Cs-Sb Activation[J].Infrared Technology,2013,35(10):202.
[4]李晓峰,张云昆,许有毅,等.多碱光电阴极光电发射过程研究[J].红外技术,2012,34(08):435.
 LI Xiao-feng,ZHANG Yun-kun,XU You-yi,et al.Study on Photoemission Process of Multi-alkali Cathode[J].Infrared Technology,2012,34(10):435.
[5]李晓峰,李莉,杨文波,等.多碱光电阴极膜厚对阴极灵敏度的影响研究[J].红外技术,2012,34(07):422.
 LI Xiao-feng,LI Li,YAN Wen-bo,et al.Study on Sensitivity of Different Thickness of Multi-Alkali Photocathode[J].Infrared Technology,2012,34(10):422.

备注/Memo

备注/Memo:
收稿日期:2018-09-30;修订日期:2018-11-20.
作者简介:赵伟林(1991-),男,助理工程师,硕士,主要研究方向:真空光电器件。E-mail:zhaoweilin@mail.bnu.edu.cn。
通信作者:李晓峰(1963-),男,研究员级高级工程师,博士,主要研究方向:真空光电器件。E-mail:lxf@nvt.com.cn。
基金项目:国家自然科学基金(11535014)。
更新日期/Last Update: 2019-10-21