[1]石广丰,韩冬冬,史国权,等.超精密车削单晶锗表面性能分析[J].红外技术,2019,41(3):208-213.[doi:10.11846/j.issn.1001_8891.201903002]
 SHI Guangfeng,HAN Dongdong,SHI Guoquan,et al.Surface Performance Analysis of Ultra-precision Turning Single Crystal Germanium[J].Infrared Technology,2019,41(3):208-213.[doi:10.11846/j.issn.1001_8891.201903002]
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超精密车削单晶锗表面性能分析
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《红外技术》[ISSN:1001-8891/CN:CN 53-1053/TN]

卷:
41卷
期数:
2019年第3期
页码:
208-213
栏目:
出版日期:
2019-03-20

文章信息/Info

Title:
Surface Performance Analysis of Ultra-precision Turning Single Crystal Germanium

文章编号:
1001-8891(2019)03-0208-06
作者:
石广丰韩冬冬史国权付? 旺王淑坤张? 华刘思宇
长春理工大学 机电工程学院
Author(s):
SHI GuangfengHAN DongdongSHI GuoquanFU WangWANG ShukunZHANG HuaLIU Siyu
School of Mechanical and Electrical Engineering Changchun University of Science and Technology
关键词:
单晶锗X射线摇摆曲线晶面间距
Keywords:
single crystal germaniumX-rayrocking curveinterplanar spacing
分类号:
TG51
DOI:
10.11846/j.issn.1001_8891.201903002
文献标志码:
A
摘要:
单晶锗是典型的红外光学晶体材料,其加工表面的评价方法大都局限于面形精度,而加工过程所产生的位错及晶面间距变化也会影响单晶锗的使用性能。为了全面地评价单晶锗加工后的表面性能,通过表面粗糙度轮廓仪、X射线衍射仪等设备,对超精密车削的单晶锗平面及曲面进行了表面粗糙度和X射线检测,获得了针对单晶锗平面的表面粗糙度与位错密度相结合的性能评价方法,及针对单晶锗曲面的表面粗糙度与晶面间距变化程度相结合的性能评价方法。相关研究对单晶锗在红外光学及其它领域的加工应用有重要意义。
Abstract:
Single-crystal germanium is a typical infrared optical crystal material. The evaluation methods of the processed surface are mostly focus on the surface accuracy, but the performance of single-crystal germanium can be affected by the dislocations generated in the processing and variation of the crystal plane spacing. In order to comprehensively evaluate the processed surface properties of single-crystal germanium, surface roughness and X-ray inspection of ultra-precision turned single-crystal planes and curved surfaces were carried out by means of a surface roughness measuring instrument, X-ray diffractometer, etc. Performance evaluation method for combining the surface roughness and dislocation density of single-crystal germanium plane and that for combining surface roughness and percentage change incrystal plane spacing of single-crystal germanium curved surface are obtained. Related research is of great significance for the processing of single-crystal germanium in infrared optics and other fields.

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备注/Memo

备注/Memo:
收稿日期:2018-06-06;修订日期:2019-01-13.
作者简介:石广丰(1981-),男,副教授,博士,主要从事超精密加工技术相关方面研究。E-mail:shiguangfeng@cust.edu.cn。
基金项目:国家自然科学基金资助项目(51405031,51575057);吉林省科技厅计划项目(20170101124JC,20180414068GH)。

更新日期/Last Update: 2019-03-19