[1]张卫锋,张若岚,赵鲁生,等.InGaAs短波红外探测器研究进展[J].红外技术,2012,34(06):361-365.
 ZHANG Wei-feng,ZHANG Ruo-lan,ZHAO Lu-sheng,et al.Development Progress of InGaAs Short-wave Infrared Focal Plane Arrays[J].Infrared Technology,2012,34(06):361-365.
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InGaAs短波红外探测器研究进展
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《红外技术》[ISSN:1001-8891/CN:CN 53-1053/TN]

卷:
34卷
期数:
2012年06期
页码:
361-365
栏目:
出版日期:
2012-12-31

文章信息/Info

Title:
Development Progress of InGaAs Short-wave Infrared Focal Plane Arrays
文章编号:
1001-8891(2012)06-0361-05
作者:
张卫锋张若岚赵鲁生胡锐史衍丽
昆明物理研究所,云南 昆明650023
Author(s):
ZHANG Wei-fengZHANG Ruo-lanZHAO Lu-shengHU RuiSHI Yan-li
Kunming Institute of Physics, Kunming Yunnan 650223, China
关键词:
InGaAs短波红外焦平面阵列红外探测器
Keywords:
InGaAsSWIRfocal plane arraysinfrared detector
分类号:
TN215
文献标志码:
A
摘要:
InxGa1-xAs材料属于Ⅲ-Ⅴ族化合物半导体合金材料,随In组分含量的不同,其光谱响应的截止波长可在0.87~3.5 ?m范围内变化,并具有高量子效率,加之成熟的MBE和MOVCD材料生长方式,很容易获得大面积高质量的外延材料,InGaAs材料因此成为一种重要的短波红外探测材料。InGaAs探测器可以在室温或近室温下工作,且具有较高的灵敏度和探测率,是小型化、低成本和高可靠性的短波红外探测系统的最佳选择,因此InGaAs短波红外探测器获得了飞速的发展和广泛的应用。同时对国内外InGaAs焦平面探测器发展状况和趋势进行了介绍。
Abstract:
As the cut-off wavelength of spectral response of the Ⅲ-Ⅴ semiconductor alloy material, InxGa1-xAs can be changed from 0.87 to 3.5 ?m by tuning the relative amount of Indium in the alloy. Besides, with high quantum efficiency, as well as mature MBE and MOVCD material growth technology, it is easy to gain large area and high-quality epitaxial materials. Therefore InGaAs become an important SWIR detector materials. InGaAs detector can work at room temperature with higher sensitivity and detectivity. So it is one of the best choices for miniature, low-cost and high-reliable SWIR detection system. The results of analysis and comparison provide guidance for rapid development of InGaAs short-wave infrared detectors. So InGaAs detectors obtain a rapid development and wide applications. At the same time, the status and development trends of the InGaAs infrared focal plane arrays(FPAs) domestic and abroad are introduced.

参考文献/References:

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备注/Memo

备注/Memo:
收稿日期:2012-05-07.
作者简介:张卫锋(1978-),男,博士生,主要从事红外系统总体结构设计、红外探测器器件模拟与表征。
通讯作者:史衍丽 (1969-),女,研究员,博士生导师,博士,主要研究方向为红外探测器研究。?
基金项目:国家自然基金项目资助,编号:U1037602.

更新日期/Last Update: 2013-09-27