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基于透射光谱的类金刚石膜光学参数反演

王贵全 张锦荣 邵毅 郑万祥 唐莹娟 胡中 姜兴平 李彦生 李伟 王乔方 字正华

王贵全, 张锦荣, 邵毅, 郑万祥, 唐莹娟, 胡中, 姜兴平, 李彦生, 李伟, 王乔方, 字正华. 基于透射光谱的类金刚石膜光学参数反演[J]. 红外技术, 2021, 43(5): 473-477.
引用本文: 王贵全, 张锦荣, 邵毅, 郑万祥, 唐莹娟, 胡中, 姜兴平, 李彦生, 李伟, 王乔方, 字正华. 基于透射光谱的类金刚石膜光学参数反演[J]. 红外技术, 2021, 43(5): 473-477.
WANG Guiquan, ZHANG Jinrong, SHAO Yi, ZHENG Wanxiang, TANG Yingjuan, HU Zhong, JIANG Xinping, LI Yansheng, LI Wei, WANG Qiaofang, ZI Zhenghua. Calculation of Optical Parameters of Diamond-like Carbon Film Based on Transmission Spectrum[J]. Infrared Technology , 2021, 43(5): 473-477.
Citation: WANG Guiquan, ZHANG Jinrong, SHAO Yi, ZHENG Wanxiang, TANG Yingjuan, HU Zhong, JIANG Xinping, LI Yansheng, LI Wei, WANG Qiaofang, ZI Zhenghua. Calculation of Optical Parameters of Diamond-like Carbon Film Based on Transmission Spectrum[J]. Infrared Technology , 2021, 43(5): 473-477.

基于透射光谱的类金刚石膜光学参数反演

详细信息
    作者简介:

    王贵全(1981-),男,高级工程师,主要从事红外材料特性与光电系统集成技术研究。E-mail:119455225@qq.com

  • 中图分类号: O635.1

Calculation of Optical Parameters of Diamond-like Carbon Film Based on Transmission Spectrum

  • 摘要: 本文采用透射光谱法测量Ge基底类金刚石薄膜(Diamond-like carbon,DLC)的光谱曲线。应用测量的光谱曲线,基于模拟退火算法,构建目标优化函数,通过光谱反演法得到薄膜的厚度、折射率、消光系数。该方法得到的Ge基底类金刚石膜的光学参数与椭偏仪测试结果比对,折射率误差小于1%,厚度误差小于2%。并且将薄膜的光学参数带入透过率理论计算模型,得到的Ge基底类金刚石薄膜透射光谱曲线和实际测试曲线的误差小于2%。该方法只需测量透射光谱曲线,通过计算就能得到薄膜光学参数,对光学薄膜设计和加工具有重要指导意义。
  • 图  1  光在均匀弱吸收表面的透射和反射

    Figure  1.  Transmission and reflection of light on uniform weak absorbing surface

    图  2  膜层不同折射率下波长与透过率变化曲线

    Figure  2.  Curves of wavelength and transmittance under different refractive index

    图  3  膜层不同厚度下波长与透过率变化曲线

    Figure  3.  Curves of wavelength and transmittance under different film thickness

    图  4  不同吸收系数下波长与透过率变化曲线

    Figure  4.  Curves of wavelength and transmittance with different absorption coefficients

    图  5  Ge基底类金刚石膜透射光谱曲线

    Figure  5.  Transmission spectrum curve of Ge based diamond-like carbon films

    图  6  模拟退火算法流程图

    Figure  6.  Flow chart of simulated annealing algorithm

    图  7  模拟退火算法反演与椭偏仪测试结果对比图

    Figure  7.  Comparison of simulated annealing algorithm inversion and ellipsometer test results

    图  8  模拟退火算法反演曲线与实测光谱透射曲线对比

    Figure  8.  Comparison between simulated annealing algorithm inversion curve and measured spectral transmission curve

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出版历程
  • 收稿日期:  2020-01-13
  • 修回日期:  2020-02-21
  • 刊出日期:  2021-05-22

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