elopment Status of Germanium Single Crystal Materials
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摘要: 锗因其资源稀缺、优异的光学和物理性能,广泛应用于光纤系统、红外光学系统、电子和太阳能应用、探测器等高科技领域,是战略性产业所需的重要功能材料和结构材料。简单介绍了目前国内锗单晶生长的两种主要方法:直拉法(Czochralski,CZ)和垂直梯度凝固法(vertical gradient freeze,VGF)。对国内和国外知名锗材料生产企业的锗单晶生长方法、直径、电阻率等相关技术参数,进行了统计和比较。针对不同的单晶材料性能,分析了红外光学用锗单晶、太阳能电池用锗单晶和高纯锗单晶的应用领域和发展现状。Abstract: Owing to its scarce resources and excellent optical and physical properties, germanium is widely used in fiber-optic systems, infrared optical systems, electronic and solar energy applications, detectors, and other high-technology fields. It is an important functional and structural material which is needed in strategic industries. Two main methods of single crystal growth in germanium, Czochralski method(CZ)and vertical gradient freeze method(VGF), were briefly introduced. Technical parameters such as the method of germanium crystal growth, diameter and resistivity of germanium in popular germanium material-producing enterprises at home and abroad were analyzed and compared. Based on the properties of different single-crystal materials, the application fields and development status of germanium single crystals for infrared optics, germanium single crystal for solar cells, and high-purity germanium single crystal were analyzed.
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表 1 2019年全球锗金属产量
Table 1. Global germanium metal production in 2019
China Russia Other countries 65% 5% 30% Other countries: Includes Belgium, Canada, Germany, Japan, and Ukraine 表 2 2015~2018年美国锗金属进口来源
Table 2. USA germanium metal import sources from 2015 to 2018
China Belgium Germany Russia Other countries 59% 22% 9% 7% 3% Notes: Import sources are based on gross weight of wrought and unwrought germanium metal and germanium metal powders 表 3 锗单晶参数指标统计
Table 3. Germanium single crystal parameter statistics
Company Growthmethod Conductivitytype Size
(upon request)Larger sizes Resistivity
(upon request)Yunnan Lincang Xinyuan Germanium Co., Ltd CZ N 10-350 mm 380 mm 5-40 Ω·cm VGF P 4、6 inch 8 inch 0.001-0.04 Ω·cm China Germanium Co., Ltd. CZ N ≤105 mm >105 mm 5-40 Ω·cm P 4、6 inch 6 inch 0.001-0.04 Ω·cm GRINM Electro-optic Materials Co., Ltd. CZ N 5-350 mm 350 mm 5-40 Ω·cm Yunnan KIRO-CH Photonics Co. Ltd. CZ N 10-300 mm 300 mm 5-40 Ω·cm Vital Materials Co., Ltd. CZ N 3-310 mm 310 mm 5-40 Ω·cm VGF P 4、6 inch 6 inch 0.001-0.04 Ω·cm Umicore CZ N 10-350 mm 350 mm 5-40 Ω·cm P 0.001-0.04 Ω·cm AXT VGF P 4、6 inch 6 inch 0.001-0.04 Ω·cm Photonic Sense CZ N 10-330 mm 450 mm 5-40 Ω·cm P - 0.001-0.04 Ω·cm Germanium and Applications Ltd. CZ N 8-300 mm 300 mm 5-40 Ω·cm P 4、6 inch 6 inch 0.01-0.05 Ω·cm 表 4 全球军民用红外市场规模及预测
Table 4. Global military and civilian infrared market size andforecastMillion Dollars
Year 2017 2018 2019 2020E 2023E Military market 8546 8886 9251 9566 10795 Civil market 4125 4573 5041 5601 7465 表 5 高纯锗探测器能量分辨率的优势
Table 5. Advantages of high purity germanium detector energy resolution
Detector Ray energy/keV FWHM(full width at half maxima)/keV HPGe 1330 1.75 HgI2 1330 22 CdTe 1330 25 GaAs 1330 22 -
[1] 张小东, 赵飞燕. 金属锗在高新技术领域中的应用[J]. 煤炭与化工, 2018, 41(2): 32-34. https://www.cnki.com.cn/Article/CJFDTOTAL-HHGZ201802010.htmZHANG Xiaodong, ZHAO Feiyan. Application of metal germanium in high-tech field[J]. Coal and Chemical Industry, 2018, 41(2): 32-34. https://www.cnki.com.cn/Article/CJFDTOTAL-HHGZ201802010.htm [2] 张苏江, 季根源, 王楠. 中国锗矿资源现状及其可持续发展对策研究[J]. 矿产保护与利用, 2017(2): 6-11. https://www.cnki.com.cn/Article/CJFDTOTAL-KCBH201702002.htmZHANG Sujiang, JI Genyuan, WANG Nan, et al. Current situation and sustainable development countermeasures of germanium resources in China[J]. Conservation and Utilization of Mineral Resources, 2017(2): 6-11. https://www.cnki.com.cn/Article/CJFDTOTAL-KCBH201702002.htm [3] Ben Depuydt, Antoon Theuwis, Igor Romandic. Germanium: From the first application of Czochralski crystal growth to large diameter dislocation-free wafers[J]. Materials Science in Semiconductor Processing, 2006(9): 437-443. http://www.sciencedirect.com/science/article/pii/S136980010600134X [4] 汐元. 中国芯片往事[J/OL]. [2020-03-17], https://www.ithome.com/0/478/239.html.XI Yuan. once upon a time with chinesechip[J/OL]. [2020-03-17], https://www.ithome.com/0/478/239.html. [5] 李宝学, 赵燕, 罗玉萍. 大直径锗单晶制备工艺研究及其指标分析[J]. 云南冶金, 2016, 45(6): 50-52. https://www.cnki.com.cn/Article/CJFDTOTAL-YNYJ201606012.htmLI Baoxue, ZHAO Yan, LUO Yuping, et al. The technical study and the index analysis on preparation of large diameter germanium single crystal[J]. Yunnan Metallurgy, 2016, 45(6): 50-52. https://www.cnki.com.cn/Article/CJFDTOTAL-YNYJ201606012.htm [6] 张亚萍, 席珍强, 张瑞丽, 等. 锗单晶材料的生长与应用[J]. 材料导报, 2009, 23(Ⅷ): 14-16. https://wenku.baidu.com/view/139a91e98662caaedd3383c4bb4cf7ec4afeb6d0ZHANG Yaping, XI Zhenqiang, ZHANG Ruili, et al. Application and growth of Czochralski germanium single crystals[J]. Materials Reports, 2009, 23(Ⅷ): 14-16. https://wenku.baidu.com/view/139a91e98662caaedd3383c4bb4cf7ec4afeb6d0 [7] 《激光与光电子学进展》编辑部. 360mm直径的锗晶体生长成功[J]. 激光与光电子学进展, 2006, 43(3): 74.Laser & Optoelectronics Progress editorial department. The 360 mm diameter germanium crystal was successfully grown[J]. Laser & Optoelectronics Progress, 2006, 43(3): 74. [8] www.Chyxx.com. Analysis on the development status and prospect of germanium industry in China in 2018[EB/OL]. http://www.chyxx.com/industry/201804/633815.html, [2018-04-24].
中国信息产业网. 2018年中国锗行业发展现状及发展前景分析[EB/OL]. http://www.chyxx.com/industry/201804/633815.html, [2018-04-24].www.Chyxx.com. Analysis on the development status and prospect of germanium industry in China in 2018[EB/OL]. http://www.chyxx.com/industry/201804/633815.html, [2018-04-24].[9] 穆晓菲. 2019年全球红外热像仪行业发展情况和市场前景分析[EB/OL]. https://www.qianzhan.com/analyst/detail/220/190820-cf8fd054.html, [2019-08-21].Mu Xiaofei. Analysis of the development situation and market prospect of the global infrared thermal imager industry in 2019[EB/OL]. https://www.qianzhan.com/analyst/detail/220/190820-cf8fd054.html, [2019-08-21]. [10] Artemyev V V, Smirnov A D, Kalaev V V, et al. Modeling of dislocation dynamics in germanium Czochralski growth[J]. Journal of Crystal Growth, 2017, 468: 443-447. doi: 10.1016/j.jcrysgro.2017.01.032 [11] Langheinrich D, Patzold O, Raabe L, et al. VGF growth of germanium single crystals without crucible contact[J]. Journal of Crystal Growth, 2010, 312: 2291-2296. doi: 10.1016/j.jcrysgro.2010.03.046 [12] 白尔隽, 郑志鹏, 高德喜, 等. 高纯锗探测器的广泛应用和自主研制进展[J]. 原子核物理评论, 2016, 33(1): 52-56. https://www.cnki.com.cn/Article/CJFDTOTAL-HWDT201601010.htmBAI Erjun, ZHENG Zhipeng, Gao Dexi, et al. Wide application and development of high purity germanium detector[J]. Nuclear Physics Review, 2016, 33(1): 52-56. https://www.cnki.com.cn/Article/CJFDTOTAL-HWDT201601010.htm [13] 刘锋, 耿博耘, 韩焕鹏, 等. 辐射探测器用高纯锗单晶技术研究[J]. 电子工业专用设备, 2012(280): 27-31. https://www.cnki.com.cn/Article/CJFDTOTAL-DGZS201205009.htmLIU Feng, GENG Boyun, Han Huanpeng, et al. Research of Ultra-purity Germanium Single Crystal's Technology for Radiation Detector[J]. Equipment for Electronic Products Manufacturing, 2012(280): 27-31. https://www.cnki.com.cn/Article/CJFDTOTAL-DGZS201205009.htm [14] 吴绪礼. 探测器级锗单晶的制备工艺[J]. 稀有金属, 1985(3): 57-62. https://www.cnki.com.cn/Article/CJFDTOTAL-ZXJS198503011.htmWU Xuli. Preparation of detector grade germanium single crystal[J]. Chinese Journal of Rare Metals, 1985(3): 57-62. https://www.cnki.com.cn/Article/CJFDTOTAL-ZXJS198503011.htm [15] YANG G, MEI H, GUAN Y T, et al. Study on the Properties of HighPurity Germanium Crystals[J]. Journal of Physics: Conference Series, 2015, 606: 012013. http://adsabs.harvard.edu/abs/2015JPhCS.606a2013Y [16] MENG X H, WANG G J, Wagner M D, etal. Fabrication and Characterization of High-Purity Germanium Detectors with Amorphous GermaniumContacts[J]. Journalof Instrumentation, 2018, 14(2): 02019-02019. http://arxiv.org/abs/1810.05662v3